Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system

• US 6,471,830 B1
• Filed: 10/03/2000
• Issued: 10/29/2002
• Est. Priority Date: 10/03/2000
• Status: Expired due to Fees

• Current Assignee: Veeco-Cvc, Inc.
• Original Assignee: Veeco-Cvc, Inc.
• Inventors: Moslehi, Mehrdad M., Paranjpe, Ajit P.
• Primary Examiner(s): Ryan, Patrick
• Assistant Examiner(s): Cantelmo, Gregg
• Application Number:
  US09/678,267
• Time in Patent Office: 756 Days
• Field of Search: 204/192.12, 204/298.06, 204/298.08, 204/298.12, 204/298.11, 204/298.15
• US Class Current: 204/192.12
• CPC Class Codes: C23C 14/358 Inductive energy
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means

Abstract

A system and related method are disclosed for performing an inductively-coupled-plasma ionized physical-vapor deposition (“PVD”) process for depositing material layers onto a substrate. Within a PVD process chamber are contained a target/cathode assembly, a chuck assembly, a process medium, a variable height inductively-coupled (“VHIC”) ionization coil segment and an antenna actuator for controlling the relative vertical position of the variable height inductively-coupled ionization coil segment. The VHIC coil segment can be contained within a dielectric liner and can be covered by a multi-slotted grounded electrostatic shield. The VHIC ionization coil segment can comprise one or more zones comprised of one or more coil loops powered by one or more radio-frequency power supplies. Each zone can be powered through an adjustable passive electrical component for providing multiple inductive zone operations during a deposition process.

Claims

1. An inductvely-coupled plasma ionized physical-vapor deposition system for depositing a material onto a substrate, comprising:

a vacuum process chamber comprising a main chamber wall and a lid;

a target assembly comprising a sputtering energy source and a target material exposed to a plasma process environment within said vacuum process chamber;

a process medium for generating a plasma within said plasma process environment of said vacuum process chamber;

an adjustable-height inductively-coupled ionization coil segment contained within said plasma process environment for providing ionization and collimabon of a sputtered species from said target material;

an antenna actuator for controlling a position of said adjustable-height inductively-coupled ionization coil segment relative to said target material within said vacuum process chamber for controlling process uniformity at said substrate during a deposition process;

a chuck assembly contained in said vacuum process chamber for supporting the substrate; and

a clamp table operable in conjunction with said chuck assembly and wherein a dielectric housing containing an antenna coil is integrated into said clamp table and surrounds the substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

2. The system of claim 1, wherein said adjustable-height inductively-coupled ionization coil segment is arranged peripherally and surrounds said process medium within said vacuum process chamber.

3. The system of claim 1, wherein said adjustable-height inductively-coupled ionization coil segment comprises a single continuous segment formed into at least one loop and forming a single-zone inductive-coupling physical-vapor deposition antenna powered by a radio-frequency power supply.

4. The system of claim 1, wherein said adjustable-height inductively-coupled ionization coil segment is further comprised of a plurality of individual loop-shaped segments.

5. The system of claim 4, wherein said plurality of individual loop-shaped segments electrically interconnect to form a continuous single-zone inductive-coupling physical-vapor deposition antenna powered by a radio-frequency power supply.

6. The system of claim 4, wherein said plurality of individual loop-shaped segments electrically interconnect to form a multi-zone inductive-coupling physical-vapor deposition antenna, wherein each zone in said multi-zone inductive-coupling physical-vapor deposition antenna is further comprised of at least one of said plurality of individual loop-shaped segments.

7. The system of claim 6, wherein at least one radio-frequency power supply powers said each zone in said multi-zone inductive-coupling physical-vapor deposition antenna.

8. The system of claim 7, wherein said at least one radio-frequency power supply is electrically connected to and powers said each zone in said multi-zone inductive-coupling physical-vapor deposition antenna through at least one adjustable electrical component for providing multiple inductive zone operation during said deposition process.

9. The system of claim 1, further comprising a chuck assembly contained in said vacuum process chamber for supporting the substrate.

10. The system of claim 9, wherein said chuck assembly is an adjustable-height chuck assembly and further comprising a chuck actuator connected to said chuck assembly for controlling a position of said chuck assembly relative to said target material.

11. The system of claim 9, wherein a dielectric housing containing an antenna coil is integrated into said chuck assembly and surrounds said substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

12. The system of claim 1, wherein said adjustable-height inductively-coupled ionization coil segment is contained within-a dielectric liner.

13. The system of claim 12, wherein said dielectric liner is covered by an electrostatic shield having a multiplicity of slots.

14. The system of claim 13, wherein said electrostatic shield is grounded.

15. The system of claim 13, wherein said electrostatic shield further comprises a multiplicity of angled fins covering said multiplicity of slots for preventing the sputtering of said sputtered species onto the surface of said dielectric housing that is exposed to said plasma process environment through said slots.

16. The system of claim 1, wherein a wafer transport system and said antenna actuator are jointly operable for facilitating automated loading and unloading of a multiplicity of wafers.

17. The system of claim 1, wherein said adjustable-height inductively-coupled ionization coil segment is arranged in a substantially cylindrical manner or in a substantially conic shaped manner.

18. An inductvely-coupled plasma ionized physical-vapor deposition system for depositing a material onto a substrate, comprising:

a vacuum process chamber comprising a main chamber wall and a lid;

a target assembly comprising a sputtering energy source and a target material exposed to a plasma process environment within said vacuum process chamber,

a process medium for generating a plasma within said plasma process environment of said vacuum process chamber;

an adjustable-height inductively-coupled ionization coil segment contained within said plasma process environment for providing ionization and collimation of a sputtered species from said target material;

an antenna actuator for controlling a position of said adjustable-height inductively-coupled ionization coil segment relative to said target material within said vacuum process chamber for controlling process uniformity at said substrate during a deposition process; and

a dielectric lid-lift insert surrounding an inductive antenna tubing is placed between said lid and said main chamber wall of said vacuum process chamber for providing enhanced ionization of said sputtered species during said deposition process.

19. The system of claim 18, wherein said adjustable-height inductively-coupled ionization coil segment is arranged peripherally and surrounds said process medium within said vacuum process chamber.

20. The system of claim 18, wherein said adjustable-height inductively-coupled ionization coil segment comprises a single continuous segment formed into at least one loop and forming a single-zone inductive-coupling physical-vapor deposition antenna powered by a radio-frequency power supply.

21. The system of claim 18, wherein said adjustable-height inductively-coupled ionization coil segment is further comprised of a plurality of individual loop-shaped segments.

22. The system of claim 21, wherein said plurality of individual loop-shaped segments electrically interconnect to form a continuous single-zone inductive-coupling physical-vapor deposition antenna powered by a radio-frequency power supply.

23. The system of claim 21, wherein said plurality of individual loop-shaped segments electrically interconnect to form a multi-zone inductive-coupling physical-vapor deposition antenna, wherein each zone in said multi-zone inductive-coupling physical-vapor deposition antenna is further comprised of at least one of said plurality of individual loop-shaped segments.

24. The system of claim 23, wherein at least one radio-frequency power supply powers said each zone in said multi-zone inductive-coupling physical-vapor deposition antenna.

25. The system of claim 24, wherein said at least one radio-frequency power supply is electrically connected to and powers said each zone in said multi-zone inductive-coupling physical-vapor deposition antenna through at least one adjustable electrical component for providing multiple inductive zone operation during said deposition process.

26. The system of claim 18, further comprising a chuck assembly contained in said vacuum process chamber for supporting the substrate.

27. The system of claim 26, wherein said chuck assembly is an adjustable-height chuck assembly and further comprising a chuck actuator connected to said chuck assembly for controlling a position of said chuck assembly relative to said target material.

28. The system of claim 26, wherein a dielectric housing containing an antenna coil is integrated into said chuck assembly and surrounds said substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

29. The system of claim 26, further comprising a clamp table operable in conjunction with said chuck assembly and wherein a dielectric housing containing an antenna coil is integrated into said clamp table and surrounds the substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

30. The system of claim 18, wherein said adjustable-height inductively-coupled ionization coil segment is contained within a dielectric liner.

31. The system of claim 30, wherein said dielectric liner is covered by an electrostatic shield having a multiplicity of slots.

32. The system of claim 31, wherein said electrostatic shield is grounded.

33. The system of claim 31, wherein said electrostatic shield further comprises a multiplicity of angled fins covering said multiplicity of slots for preventing the sputtering of said sputtered species onto the surface of said dielectric housing that is exposed to said plasma process environment through said slots.

34. The system of claim 18, wherein a wafer transport system and said antenna actuator are jointly operable for facilitating automated loading and unloading of a multiplicity of wafers.

35. The system of claim 18, wherein said adjustable-height inductively-coupled ionization coil segment is arranged in a substantially cylindrical manner or in a substantially conic shaped manner.

36. An inductvely-coupled plasma ionized physical-vapor deposition system for depositing a material onto a substrate, comprising:

a vacuum process chamber comprising a main chamber wall and a lid for processing the substrate;

a target assembly comprising a sputtering energy source and a target material exposed to a plasma process environment within said vacuum process chamber;

a chuck assembly for supporting said substrate;

a process medium for generating a plasma within said plasma process environment of said vacuum process chamber; and

an inductive antenna tubing contained within a dielectric lid-lift insert between said lid and said main chamber wall of said vacuum process chamber for providing ionization and collimation of a sputtered species during a deposition process.

37. The system of claim 36, wherein said inductive antenna tubing is arranged in a substantially planar spiral or a substantially planar circular manner.

38. The system of claim 36, wherein said inductive antenna tubing is arranged in a graded conic manner.

39. The system of claim 36, further comprising a variable height inductively-coupled ionization coil segment contained within said plasma process environment and coupled to an antenna actuator for controlling a position of said variable-height inductively-coupled ionization coil segment relative to said target material for providing enhanced ionization and collimation of said sputtered species from said target material.

40. The system of claim 36, wherein said inductive antenna tubing comprises a single continuous segment formed into at least one loop and forming a single-zone inductive-coupling physical-vapor deposition antenna.

41. The system of claim 36, wherein said inductive antenna tubing is further comprised of a plurality of individual loop-shaped segments.

43. The system of claim 41, wherein said plurality of individual loop-shaped segments electrically interconnect to form a multi-zone inductive-coupling physical-vapor deposition antenna, wherein each zone in said multi-zone inductive-coupling physical-vapor deposition antenna is further comprised of at least one of said plurality of individual loop-shaped segments.

44. The system of claim 43, wherein at least one radio-frequency power supply powers said each zone in said multi-zone inductive-coupling physical-vapor deposition antenna.

45. The system of claim 44, wherein said at least one radio-frequency power supply is electrically connected to and powers said each zone in said multi-zone inductive-coupling physical-vapor deposition antenna through at least one adjustable electrical component for providing multiple inductive zone operation during said deposition process.

46. The system of claim 36, wherein said dielectric lid lift insert is covered by an electrostatic shield having a multiplicity of slots.

47. The system of claim 46, wherein said electrostatic shield is grounded.

48. The system of claim 47, wherein said, electrostatic shield further comprises a multiplicity of angled fins covering said multiplicity of slots for preventing the sputtering of said sputtered species onto the surface of said dielectric housing that is exposed to said plasma process environment through said slots.

49. The system of claim 36, wherein a dielectric housing containing an antenna coil is integrated into said chuck assembly and surrounds said substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

50. The system of claim 49, further comprising a clamp table operable in conjunction with said chuck assembly and wherein a dielectric housing containing an antenna coil is integrated into said clamp table and surrounds the substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

42. The system of claim 42, wherein said plurality of individual loop-shaped segments electrically interconnect to form a continuous single-zone inductive-coupling physical-vapor deposition antenna.

51. A method for inductively-coupled plasma ionized physical-vapor deposition of a material layer onto a substrate in a vacuum process chamber having a plasma process environment, comprising:

supporting said substrate using a chuck assembly;

placing a dielectric lid-lift insert containing an inductive antenna tubing between a lid and a main chamber wall of said vacuum process chamber; and

applying radio-frequency power from at least one radio-frequency power supply to said inductive antenna tubing for ionization and collimation of a sputtered species emitted from a target material during a deposition process.

52. The method of claim 51, wherein said inductive antenna tubing is arranged peripherally and surrounds said target material.

53. The method of claim 51, further comprising:

coupling an adjustable-height inductively-coupled ionization coil segment contained within said plasma process environment to an antenna actuator; and

controlling a position of said adjustable-height inductively-coupled ionization coil segment relative to said target material using said antenna actuator for providing enhanced ionization and collimation of a sputtered species from said target material.

54. The method of claim 53, further comprising:

operating a clamp table in conjunction with said chuck assembly for holding said substrate; and

integrating a dielectric housing containing an antenna coil into said clamp table wherein said antenna coil is placed peripherally with respect to said substrate and surrounds said substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

55. The method of claim 53, further comprising integrating a dielectric housing containing an antenna coil into a clamp table wherein said antenna coil is placed peripherally with respect to said substrate and surrounds said substrate for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

56. The method of claim 53, wherein said inductive antenna tubing is further comprised of a plurality of individual loop-shaped segments.

57. The method of claim 56, further comprising electrically interconnecting said plurality of individual loop-shaped segments to form a multi-zone inductive-coupling physical-vapor deposition antenna, wherein each zone in said multi-zone inductive-coupling physical-vapor deposition antenna is further comprised of at least one of said plurality of individual loop-shaped segments.

58. The method of claim 57, wherein at least one of said at least one radio-frequency power supplies powers said each zone in said multi-zone inductive-coupling physical-vapor deposition antenna.

59. The method of claim 57, further comprising varying said radio-frequency power applied to each of said each zones in said multi-zone inductive-coupling physical-vapor deposition antenna independently of each of other ones of said each zones in said multi-zone inductive-coupling physical-vapor deposition antenna for providing additional ionization and collimation uniformity optimization of said sputtered species during said deposition process.

60. The method of claim 53, further comprising the steps of:

initially setting the amount of said radio-frequency power applied to said inductive antenna tubing at a higher level at the beginning of said deposition process; and

successively reducing the amount of said radio-frequency power throughout said deposition process duration to enhance an overall bottom coverage, step coverage, and conformality of the deposition process on said substrate, wherein said substrate comprises high-aspect-ratio surface features.

61. The method of claim 60, wherein said successively reducing step further comprises the step of continuously reducing said radio-frequency power to form a power ramp-down profile in time between a higher level at the beginning of said deposition process and a lower level at the end of said deposition process.

62. The method of claim 60, wherein said successively reducing step further comprises the step of reducing said radio-frequency power in a step-wise manner to form a step-wise reduced power ramp-down profile in time between a higher level at the beginning of said deposition process and a lower level at the end of said deposition process.

63. The method of claim 53, further steps of:

supplying electrical bias power to said chuck assembly;

setting the amount of said electrical bias power applied to said chuck assembly at the beginning of said deposition process to an initial value; and

successively reducing the amount of said electrical bias power throughout said deposition process duration to enhance an overall bottom coverage, step coverage, and conformality of the deposition process on said substrate, wherein said substrate comprises high-aspect-ratio surface features.

64. The method of claim 63, wherein said successively reducing step further comprises the step of continuously reducing said radio-frequency power to form a continuously reduced power ramp-down profile in time between a higher level at the beginning of said deposition process and a lower level at the end of said deposition process.

65. The method of claim 63, wherein said successively reducing step further comprises reducing said radio-frequency power in a step-wise fashion to form step-wise reduced power ramp-down profile in time between a higher level at the beginning of said deposition process and a lower level at the end of said deposition process.