Flexibly suspended gas distribution manifold for plasma chamber

• US 6,477,980 B1
• Filed: 01/20/2000
• Issued: 11/12/2002
• Est. Priority Date: 01/20/2000
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: White, John M., Blonigan, Wendell T., Keller, Ernst
• Primary Examiner(s): BUEKER, RICHARD R
• Application Number:
  US09/488,612
• Time in Patent Office: 1,027 Days
• Field of Search: 118/715, 118/723.E, 156/345.34
• US Class Current: 118/723.00E
• CPC Class Codes: C23C 16/455 characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: Y10T 29/49428 Gas and water specific plumbing component making
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.

Claims

1. A gas inlet manifold for a plasma chamber, comprising:

a back wall perforated by a gas inlet orifice, wherein the back wall has a surface that is generally rectangular with four sides;

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is spaced away from the back wall and has a surface facing said surface of the back wall that is generally rectangular with four sides; and

a suspension that encircles a region within the gas inlet manifold extending between the back wall and the gas distribution plate, wherein the gas inlet orifice and the gas outlet orifices are in fluid communication with said region;

wherein the suspension comprises four generally rectangular sheets;

wherein each sheet has a first end attached to and abutting the back wall and a second end attached to and abutting the gas distribution plate so that each of the four sheets extends between a corresponding one of the sides of said surface of the back wall and a corresponding one of the sides of said surface of the gas distribution plate; and

wherein substantially all of each sheet is sufficiently thin so as to be flexible.

2. A gas inlet manifold for a plasma chamber, comprising:

a back wall perforated by a gas inlet orifice;

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is spaced away from the back wall; and

a suspension that encircles a region within the gas inlet manifold extending between the back wall and the gas distribution plate, wherein the gas inlet orifice and the gas outlet orifices are in fluid communication with said region;

wherein the suspension consists of a single sheet having a first end attached to and abutting the back wall and a second end attached to and abutting the gas distribution plate, and

wherein substantially all of the sheet is sufficiently thin so as to be flexible.

3. A manifold according to claim 2, wherein:

the gas distribution plate and the suspension each have a circular transverse cross section; and

the sheet is cylindrical.

4. A gas inlet manifold according to claim 2, wherein the sheet is cylindrical.

5. A gas inlet manifold for a plasma chamber, comprising:

a back wall perforated by a gas inlet orifice;

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is spaced away from the back wall;

a suspension comprising first and second segments separated by a gap, wherein the gap has its longest dimension extending between the back wall and the gas distribution plate, wherein

each segment of the suspension includes a first end, a second end, and at least one flexible portion between the first and second ends,

the first end of each segment is attached to and abuts the back wall,

the second end of each segment is attached to and abuts the gas distribution plate, and

the suspension encircles a region within the gas inlet manifold extending between the back wall and the gas distribution plate, so that the suspension has an inner surface facing said region and an outer surface facing away from said region, wherein the gas inlet orifice and the gas outlet orifices are in fluid communication with said region; and

a cover having first and second parallel members joined by a transverse member, the cover being positioned so that said gap is between the two parallel members and so that the first and second parallel member are immediately adjacent the inner and outer surfaces of the suspension, respectively.

6. A gas inlet manifold according to claim 5, wherein the two parallel members of the cover are spaced sufficiently close to each other and to the suspension segments so as to impede gas within the gas inlet manifold from flowing through said gap between the suspension segments.

7. A gas inlet manifold for a plasma chamber, comprising:

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is generally planar;

a back wall perforated by a gas inlet orifice, wherein the back wall has a generally planar surface that faces, and is parallel to, the gas distribution plate;

a suspension having a first end, a second end, and at least one flexible portion between the first and second ends, wherein

the first end is attached to the back wall,

the second end is attached to the gas distribution plate,

the suspension encircles a region within the gas inlet manifold extending between the back wall and the gas distribution plate, wherein the gas inlet orifice and the gas outlet orifices are in fluid communication with said region, and

the suspension includes first and second segments separated by a gap that extends between the back wall and the gas distribution plate, wherein said gap occupies an elongated region that is generally perpendicular to said surface of the back wall and that is generally perpendicular to the gas distribution plate; and

a cover having two parallel members joined by a transverse member, the cover being positioned so that said gap is between the two parallel members and so that the two parallel members are immediately adjacent opposite sides of the suspension.

8. A gas inlet manifold for a plasma chamber, comprising:

a back wall perforated by a gas inlet orifice;

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is spaced away from the back wall;

a suspension having a first end, a second end, and at least one flexible portion between the first and second ends, wherein

the first end is attached to the back wall,

the second end is attached to the gas distribution plate, and

the suspension encircles a region within the gas inlet manifold extending between the back wall and the gas distribution plate, wherein the gas inlet orifice and the gas outlet orifices are in fluid communication with said region; and

a sealing flange having an inner member and an outer member joined together along an elongated junction that bisects both the inner member and the outer member;

wherein the suspension includes first and second segments separated by a gap that extends between the back wall and the gas distribution plate; and

wherein the sealing flange is positioned so that the junction of the sealing flange is within said gap and so that the first and second segments of the suspension are between the inner and outer members of the sealing flange.

9. A gas inlet manifold for a plasma chamber, comprising:

a top wall perforated by a gas inlet orifice;

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is spaced away from the top wall; and

a side wall having one or more segments;

wherein the side wall encircles a region within the gas inlet manifold extending between the top wall and the gas distribution plate, so that the gas inlet orifice and the gas outlet orifices are in fluid communication with said region;

wherein each side wall segment has an upper end attached to and abutting the top wall of the gas inlet manifold and a lower end attached to and abutting the gas distribution plate; and

wherein substantially all of each side wall segment is sufficiently thin so as to be flexible.

10. A gas inlet manifold according to claim 9, wherein:

the top wall has a surface facing the gas distribution plate that is generally rectangular with four sides;

the gas distribution plate has a surface facing the top wall that is generally rectangular with four sides;

the side wall includes four of said segments respectively associated with a respective one of the four sides of the top wall and a respective one of the four sides of the gas distribution plate, wherein the upper end of each segment is attached to the top wall adjacent the associated side of the top wall, and wherein the lower end of each segment is attached to the gas distribution plate adjacent the associated side of the gas distribution plate.

11. A gas inlet manifold according to claim 9, wherein:

the top wall has a generally circular surface facing the gas distribution plate;

the gas distribution plate has a generally circular surface facing the top wall; and

the side wall consists of a single segment comprising a generally cylindrical sheet.

12. A gas inlet manifold according to claim 9, wherein each side wall segment is a vertically oriented sheet.

13. A gas inlet manifold according to claim 9, wherein said side wall consists of said side wall segments.

14. A gas inlet manifold for a plasma chamber, comprising:

a top wall perforated by a gas inlet orifice;

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is spaced away from the top wall; and

a side wall having a plurality of side wall segments including first and second side wall segments;

wherein the side wall encircles a region within the gas inlet manifold extending between the top wall and the gas distribution plate, so that the gas inlet orifice and the gas outlet orifices are in fluid communication with said region;

wherein each side wall segment includes;

(i) an upper end attached to the top wall of the gas inlet manifold,

(ii) a lower end attached to the gas distribution plate, and

(iii) a vertically oriented sheet extending between the upper end and the lower end of the side wall segment,

wherein the sheet of the first side wall segment is bent at a first angle along a first vertical vertex line so that;

(i) a lateral end portion of the sheet extends between the first vertex line and an edge of the sheet, and (ii) a central portion of the sheet lies on the opposite side of the first vertex line;

wherein the sheet of the second side wall segment is bent at a second angle along a second vertical vertex line so that;

(i) a lateral end portion of the sheet extends between the second vertex line and an edge of the sheet, and (ii) a central portion of the sheet lies on the opposite side of the second vertex line;

wherein said edge of the sheet of the first side wall segment and said edge of the sheet of the second side wall segment are positioned so as to be parallel and separated by a gap, wherein the gap has a longest dimension extending vertically between the top wall of the gas inlet manifold and the gas distribution plate; and

wherein the first and second angles are such that the respective lateral end portions of the first and second side wall segments are coplanar and are separated only by said gap.

15. A gas inlet manifold according to claim 14, wherein both the first angle and the second angle are 45 degrees.

16. A gas inlet manifold for a plasma chamber, comprising:

a back wall perforated by a gas inlet orifice;

a gas distribution plate perforated by a number of gas outlet orifices, wherein the gas distribution plate is spaced away from the back wall; and

one or more side wall segments;

wherein each side wall segment has a first end attached to and abutting the back wall of the gas inlet manifold and a second end attached to and abutting the gas distribution plate; and

wherein substantially all of each side wall segment is flexible.

17. A gas inlet manifold according to claim 16, wherein:

said one or more side wall segments collectively encircle a region within the gas inlet manifold extending between the top wall and the gas distribution plate, so that the gas inlet orifice and the gas outlet orifices are in fluid communication with said region.

18. A gas inlet manifold according to claim 16, wherein each side wall segment is a flexible sheet.