Inductor and transformer formed with multi-layer coil turns fabricated on an integrated circuit substrate

• US 6,480,086 B1
• Filed: 12/20/1999
• Issued: 11/12/2002
• Est. Priority Date: 12/20/1999
• Status: Expired due to Term

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Asghar, Saf, Kluge, Wolfram, Eggert, Dietmar
• Primary Examiner(s): MAI, ANH T
• Application Number:
  US09/468,014
• Time in Patent Office: 1,058 Days
• Field of Search: 336/200, 336/223, 336/232, 336/83
• US Class Current: 336/200
• CPC Class Codes: H01F 17/0013 with stacked layers
• CPC Class Codes: H01L 28/10 Inductors

Abstract

An inductor and transformer comprise a plurality of interleaved conductive layers and insulation layers fabricated on a monolithic semiconductor integrated circuit die. The conductive layers are shaped into coil turns of the inductor and the transformer, and are stacked vertically (perpendicular to the horizontal plane of the coil layers) and proximate to one another so as to achieve close magnetic coupling therebetween, thereby achieving a larger inductance value for a given sized coil structure. The conductive layer coil turns are connected together with conductive vias through the interposing insulation layers.

Claims

1. An integrated circuit apparatus having a transformer thereon, said apparatus comprising:

an integrated circuit substrate;

a first insulation layer over a face of said integrated circuit substrate;

a plurality conductive layers, each of said plurality of conductive layers shaped in the form of a first coil turn and a second coil turn wherein the first coil turn is concentrically located within the second coil turn, the first and second coil turns each having first and second ends;

a plurality of insulation layers interleaved between said plurality of conductive layers;

a one of said plurality of conductive layers proximate to said first insulation layer and the other ones of said plurality of conductive layers stacked over the one with said plurality of insulation layers interleaved therebetween; and

a plurality of conductive vias connecting adjacent ones of the first and second coil turns of said plurality of conductive layers, thereby forming a transformer comprising a first coil and a second coil.

2. The apparatus of claim 1, wherein respective ones of said plurality of conductive vias connect second ends of each of the ones of the first and second coil turns of said plurality of conductive layers to first ends of each of the adjacent ones of the first and second coil turns, respectively, of said plurality of conductive layers, thereby forming the first and second coils which are concentrically aligned.

3. The apparatus of claim 2, wherein each of the respective ones of said plurality of conductive vias is at least one via.

4. The apparatus of claim 2, wherein each of the respective ones of said plurality of conductive vias is two or more vias so as to reduce electrical connection resistance thereof.

5. The apparatus of claim 1, wherein the first and second coil turns of said plurality of conductive layers are selected from the group consisting of round, square, rectangle, triangle, oval, hexagon and octagon.

6. The apparatus of claim 1, wherein said plurality of conductive layers is made of metal.

7. The apparatus of claim 6, wherein the metal is selected from the group consisting of copper, aluminum, copper alloy and aluminum alloy.

8. The apparatus of claim 1, wherein said plurality of conductive layers is made of conductive doped polysilicon.

9. The apparatus of claim 1, further comprising a magnetic material interposed inside of an inner diameter of the first coil turn of said plurality of conductive layers so as to increase the inductance thereof.

10. The apparatus of claim 9, wherein the magnetic material is selected from the group consisting of iron, iron oxide, ferrite ceramic and ferrous oxide.

11. The apparatus of claim 1, wherein the number of the first coil turns connected together to form the first coil is different than number of the second coil turns connected together to form the second coil, wherein an impedance change occurs between the first and second coils.

12. The apparatus of claim 1, wherein the number of the first coil turns connected together to form the first coil is different then the number of the second coil turns connected together to form the second oil, wherein a voltage change occurs between the first and second coils.