Micromachined devices with stop members
First Claim
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1. A micromachined device comprising:
- a substrate;
a micromachined first body suspended over the substrate in a plane parallel to the substrate and movable in the plane in a first direction relative to the substrate;
a driver for moving the first body in the first direction; and
a first stop member, separate from the driver, adjacent the first body, and anchored to the substrate, the stop member having a first portion coplanar with the body for limiting motion in the plane in a direction perpendicular to the first direction, and a second portion extending over the body for physically limiting movement of the body orthogonal to the plane and away from the substrate, the stop member not performing any driving function.
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Abstract
A micromachined device has a first body suspended over a substrate in a plane parallel to the substrate and movable in the plane in a first direction relative to the substrate. A driver moves the first body in the first direction. A stop member, anchored to the substrate, limits motion of the body in the plane in a direction perpendicular to the first direction, and in a direction orthogonal to the plane and away from the substrate.
105 Citations
18 Claims
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1. A micromachined device comprising:
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a substrate;
a micromachined first body suspended over the substrate in a plane parallel to the substrate and movable in the plane in a first direction relative to the substrate;
a driver for moving the first body in the first direction; and
a first stop member, separate from the driver, adjacent the first body, and anchored to the substrate, the stop member having a first portion coplanar with the body for limiting motion in the plane in a direction perpendicular to the first direction, and a second portion extending over the body for physically limiting movement of the body orthogonal to the plane and away from the substrate, the stop member not performing any driving function. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A micromachined device comprising:
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a substrate;
a micromachined first body suspended over the substrate in a plane parallel to the substrate and movable in the plane relative to the substrate along a first direction;
means for dithering the body in the first direction; and
means, separate from the dithering means, for physically limiting motion of the body in the plane along a second direction orthogonal to the first direction and in a direction orthogonal to the plane and away from the substrate.
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Specification