Microelectromechanical system for measuring angular rate

DC CAFC
  • US 6,508,122 B1
  • Filed: 09/15/2000
  • Issued: 01/21/2003
  • Est. Priority Date: 09/16/1999
  • Status: Expired due to Term
First Claim
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1. A microelectromechanical system (MEMS) for measuring angular rate of a carrier, comprising:

  • an angular rate sensor unit receiving dither driver signals, capacitive pickoff excitation signals and a displacement restoring signal and outputting angle rate signals in response to motion of said carrier and dither motion signals;

    a central circuitry receiving said angle rate signals in response to said motion of said carrier and said dither motion signals and outputting angular rate signals and digital low frequency inertial element displacement signals; and

    a digital signal processing system analyzing said digital low frequency inertial element displacement signals and feeding back said dither driver signals to said angular rate sensor unit.

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