MEMS sensor with single central anchor and motion-limiting connection geometry

• US 6,513,380 B2
• Filed: 06/19/2001
• Issued: 02/04/2003
• Est. Priority Date: 06/19/2001
• Status: Expired due to Term

• Current Assignee: Pineapple34, LLC
• Original Assignee: Microsensors Incorporated
• Inventors: Dao, Phu Cu, Reeds, John William III, Hsu, Ying Wen
• Primary Examiner(s): MOLLER, RICHARD ALAN
• Application Number:
  US09/884,880
• Publication Number:
  US 20020189352A1
• Time in Patent Office: 595 Days
• Field of Search: 735/142.9, 735/040.2, 735/040.3, 735/040.4, 735/041.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type

Abstract

Disclosed is a MEMS sensor including a sense element and a single anchor that supports the sense element arranged in a central hub-like fashion that reduces the effects of thermal stress. Usually, two or more anchors are required to suitably constrain the sense element'"'"'s motion. The anchor disclosed herein, however, supports the sense element with connection elements having a connection geometry that substantially limits the motion of the sense element to a single-degree-of-freedom. The connection elements may include, for example, converging flexures, an extender bar, or both.

Claims

1. An improved micro-electro-mechanical systems (MEMS) sensor having a substrate and a sense element that exhibits a motion relative to the substrate in response to an influence to be sensed, the improvement comprising:

a central aperture in the sense element;

a single centrally-located anchor extending from the substrate and positioned within the sense element'"'"'s central aperture to support the sense element above the substrate; and

a means for connecting the sense element to the single anchor and substantially constraining the motion of the sense element to a single degree of freedom.

2. The improved MEMS sensor of claim 1 wherein the sense element is substantially disk-shaped.

3. The improved MEMS sensor of claim 2 wherein the motion of the sense element is substantially constrained to a single rotary oscillation about an axis that is substantially parallel to the substrate.

4. The improved MEMS sensor of claim 1 wherein the sense element is substantially rectangular.

5. The improved MEMS sensor of claim 4 wherein the motion of the sense element is substantially constrained to a single rotary oscillation about an axis that is substantially parallel to the substrate.

6. The improved MEMS sensor of claim 4 wherein the sense element'"'"'s single degree of freedom motion is a linear motion along an axis that is substantially parallel to the substrate.

7. The improved MEMS sensor of claim 1 wherein the connecting means comprises two pairs of flexure elements extending from opposite sides of the single anchor, each pair of flexure elements originating from a first pair of spaced apart positions on the single anchor that are separated from one another by a first distance, then extending and converging towards one another before connecting to the sense element.

8. The improved MEMS sensor of claim 7 wherein the flexure elements connect to the sense element at a second pair of spaced apart positions that are separated from one another by a second smaller distance.

9. The improved MEMS sensor of claim 8 wherein the sense element'"'"'s central aperture has a pair of opposing inner sides, wherein the single anchor has a pair of opposing outer sides that are substantially facing the central aperture'"'"'s pair of opposing inner sides, and wherein the connecting means comprises first and second pairs of flexure elements that extend from each of the single anchor'"'"'s opposing outer sides in a convergent direction towards a corresponding one of the central aperture'"'"'s opposing inner sides.

10. The improved MEMS sensor of claim 1 wherein the connecting means comprises:

first and second bar elements that extend substantially parallel to the substrate and to opposite sides of the single anchor; and

first and second pairs of flexure elements that connect the first and second bar elements to the sense element.

11. The improved MEMS sensor of claim 10 wherein the first and second bar elements comprise a substantially rectangular member supported by the single anchor.

12. The improved MEMS sensor of claim 1 wherein the sense element comprises a plate with a central aperture and wherein the single anchor is located within the central aperture.

13. The improved MEMS sensor of claim 12 wherein the central aperture has opposed inner sides, wherein the single anchor has opposed outer sides, and wherein the connecting means comprises first and second pairs of converging flexures that extend in opposite directions from the single anchor'"'"'s first and second outer sides to the central aperture'"'"'s first and second inner sides.

14. The improved MEMS sensor of claim 1 wherein the influence to be sensed is angular rate.

15. The improved MEMS sensor of claim 1 wherein the influence to be sensed is acceleration.

16. The improved MEMS sensor of claim 15 wherein the influence to be sensed is linear acceleration.

17. A micro-electro-mechanical systems (MEMS) sensor comprising:

a substrate;

a sense element having a central aperture, said sense element exhibiting a sense motion relative to a sense axis passing through the central aperture in response to an influence to be sensed;

a single anchor extending from the substrate within the sense element'"'"'s central aperture to support the sense element; and

a means for connecting the sense element to the single anchor, the connecting means having a geometry that substantially limits the motion of the sense element to a single degree of freedom corresponding to the sense motion.

18. A micro-electro-mechanical systems (MEMS) sensor comprising:

a substrate;

a sense element having a central aperture, said sense element being in a plane substantially parallel to the substrate and exhibiting a motion in response to an influence to be sensed;

a single anchor extending substantially perpendicularly from the substrate within the sense element'"'"'s central aperture to support the sense element; and

connecting elements that connect the single anchor to the sense element within the central aperture, the connecting elements having a geometry that substantially facilitates motion of the sense element relative to a first sense axis passing through the central aperture and substantially inhibits other motion relative to the first sense axis and motions relative to second and third axes that are perpendicular to the first sense axis and to one another.