SOI-type semiconductor device and method of forming the same

• US 6,518,645 B2
• Filed: 03/11/2002
• Issued: 02/11/2003
• Est. Priority Date: 03/30/2001
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Rhee, Hwa-Sung, Kim, Sang-Su, Bae, Geum-Jong, Choe, Tae-Hee
• Primary Examiner(s): NGO, NGAN V
• Application Number:
  US10/095,169
• Publication Number:
  US 20020139977A1
• Time in Patent Office: 337 Days
• Field of Search: 257/347, 257/349, 257/351, 257/353, 257/354, 257/616, 438/154, 438/164
• US Class Current: 257/616
• CPC Class Codes: H01L 29/66772 Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates H01L29/66666 takes precedence; thin film FinFETs H01L29/66795
• CPC Class Codes: H01L 29/78615 with a body contact
• CPC Class Codes: H01L 29/78684 having a semiconductor body comprising semiconductor materials of Group IV not being silicon, or alloys including an element of the group IV, e.g. Ge, SiN alloys, SiC alloys H01L29/7869 takes precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

In an SOI-type semiconductor device and a method of forming the same a semiconductor device is formed in an SOI-type substrate that is composed of a lower silicon layer, a buried oxide layer, and an SOI layer. The SOI substrate includes a device region isolated by a device isolation layer and the buried oxide layer, in which a source/drain region for forming at least one MOSFET at a body composed of the SOI layer is formed; and a ground region which is isolated from the device region by the device isolation layer and is composed of the body. A bottom portion of the device isolation layer is separated from the buried oxide layer by a connecting portion that electrically connects a body of the device region to a body of the ground region through the SOI layer. A silicon germanium layer is formed in the SOI layer, and at least partially remains at the SOI layer connecting the body of the device region to the body of the ground region in the connecting portion. Preferably, the device isolation layer is a trench-type isolation layer. The silicon germanium layer is formed at an interface between the SOI layer and the lowest portion of the SOI layer, i.e., a buried oxide layer, or is sandwiched between silicon layers that constitute the SOI layer under the SOI layer.

Claims

1. A silicon-on-insulator(SOI)-type semiconductor device including a lower silicon layer, a buried oxide layer, and an SOI layer comprising:

a device region isolated by a device isolation body and the buried oxide layer, in which a source/drain region is provided for forming at least one device in the SOI layer; and

a ground region isolated from the device region by the device isolation body; and

a silicon germanium layer formed in the SOI layer, a connection portion of the silicon germanium layer extending beneath the device isolation body to connect the device region to the ground region.

2. The device of claim 1 wherein the device isolation body extends partially into the upper surface of the silicon germanium layer.

3. The device of claim 1, wherein the silicon germanium layer is formed at an interface between the SOI layer and the buried oxide layer.

4. The device of claim 1, wherein the silicon germanium layer is formed between silicon layers constituting the SOI layer.

5. The device of claim 1, wherein a content of germanium in the silicon germanium layer is 10 to 40 percent by weight.

6. The device of claim 1, wherein the silicon germanium layer comprises a single crystalline layer.

7. The device of claim 6, wherein the silicon germanium single crystalline layer has a thickness of 100 to 800 angstroms, and wherein the silicon crystalline layer thereon has a thickness of 500 to 2000 angstroms.

8. The device of claim 1, wherein a channel ion implantation using boron ions is carried out for an NMOS transistor formed in the device region, and wherein a high concentration P-type ion implantation is carried out in the ground region.

9. The device of claim 1, wherein the device isolation body is formed using trench-type device isolation.

10. The device of claim 1, wherein the device region is an NMOS transistor region;

wherein a PMOS transistor region is further included in the SOI layer;

wherein the connecting portion is formed only under the device isolation body between the NMOS transistor region and the ground region; and

wherein a transistor device formed by the NMOS transistor region and the PMOS transistor region constitutes a CMOS semiconductor device.

11. A method of forming an SOI-type semiconductor device, comprising the steps of:

preparing an SOI-type substrate including a lower silicon layer, a buried oxide layer, and an SOI layer wherein a silicon germanium layer is formed in a lower portion of the SOI layer; and

forming a trench isolation layer on the SOI-type substrate, wherein a bottom portion of the trench device isolation layer is located on the silicon germanium layer at a predetermined location between a device region and a ground region.

12. The method of claim 11 wherein the device isolation layer extends partially into the upper surface of the silicon germanium layer.

13. The method of claim 11, wherein the step of forming the trench isolation layer comprises the steps of:

forming a shallow trench partially into the silicon germanium layer so as to separate a bottom portion of the trench from the buried oxide layer by the remaining silicon germanium layer in the predetermined location;

forming a deep trench so as to expose the buried oxide layer in the device isolation region other than in the predetermined portion; and

stacking an oxide layer using a chemical vapor deposition (CVD) technique to fill the deep and shallow trenches.

14. The method of claim 11, after the step of forming the trench isolation layer, further comprising the steps of:

forming an ion implanting mask, and performing an ion implantation for forming an electrode to the SOI layer of the ground region;

performing a channel ion implantation to the device region;

forming a gate electrode pattern including a gate electrode of the device region; and

performing ion implantation for forming a source/drain region in the device region, using the gate electrode pattern as an ion implanting mask.

15. The method of claim 14, wherein the channel ion implantation and the ion implantation for forming the source/drain region are performed once for PMOS and NMOS transistor regions;

and

wherein a gate electrode is patterned to both the PMOS transistor region and the NMOS transistor region.

16. The method of claim 15, wherein the step of performing ion implantation for forming the electrode in the SOI layer of the ground region are performed at the same time as when ions are implanted into the PMOS transistor region in the steps of performing the ion implantation for forming the source/drain region.