Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework

  • US 6,546,508 B1
  • Filed: 10/29/1999
  • Issued: 04/08/2003
  • Est. Priority Date: 10/29/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A method, comprising:

  • receiving at a first interface operational state data of a processing tool related to the manufacture of a processing piece;

    sending the state data from the first interface to a fault detection unit;

    determining if a fault condition exists with the processing tool based upon the state data; and

    shutting down the processing tool providing that the fault condition exists.

View all claims

    Thank you for your feedback