Stage system with onboard linear motor
First Claim
1. A stage system with onboard linear motor, comprising an anti-turning stage kept against rotation, a turning stage lying on the anti-turning stage for rotation relatively to the anti-turning stage, a rolling bearing means interposed between the anti-turning stage and the turning stage to support the turning stage for free rotation, and a turning linear motor for driving the turning stage over a tiny amount of angle in either direction of rotation, wherein the turning linear motor is comprised of a primary side of more than one armature winding arranged in juxtaposition in straight line on either one of the turning stage and the anti-turning stage, and a secondary side of field magnets arranged in juxtaposition in opposition to the armature winding on another of the turning stage and the anti-turning stage, with magnetic poles alternating in polarity in straight line.
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Accused Products
Abstract
Here is disclosed a stage system enabling position control of a tiny angle by virtue of a linear motor and becoming greater in response ability, with even slimness and small size in construction. The stage system has a first stage lying on a base stage for linear movement in an X-direction relatively to the base stage, a second stage lying on the first stage for linear movement relatively to the first stage in a Y-direction, a turning stage lying on the second stage to be supported through rolling bearing means on the second stage, and a turning linear motor for driving the turning stage over a tiny amount of angle in either direction of rotation. The turning linear motor is comprised of a primary side of more than one armature winding arranged in juxtaposition in straight line on the second stage, and a secondary side of field magnets arranged in juxtaposition in opposition to the armature winding on the turning stage, with magnetic poles alternating in polarity in straight line.
26 Citations
13 Claims
- 1. A stage system with onboard linear motor, comprising an anti-turning stage kept against rotation, a turning stage lying on the anti-turning stage for rotation relatively to the anti-turning stage, a rolling bearing means interposed between the anti-turning stage and the turning stage to support the turning stage for free rotation, and a turning linear motor for driving the turning stage over a tiny amount of angle in either direction of rotation, wherein the turning linear motor is comprised of a primary side of more than one armature winding arranged in juxtaposition in straight line on either one of the turning stage and the anti-turning stage, and a secondary side of field magnets arranged in juxtaposition in opposition to the armature winding on another of the turning stage and the anti-turning stage, with magnetic poles alternating in polarity in straight line.
Specification