Microelectromechanical systems device and method for fabricating same

  • US 6,574,033 B1
  • Filed: 02/27/2002
  • Issued: 06/03/2003
  • Est. Priority Date: 02/27/2002
  • Status: Active Grant
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First Claim
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1. A microelectromechanical systems device comprising:

  • a plurality of elements each having at least two layers, the layers being disposed in a stacked relationship with a gap therebetween when the element is in an undriven state, the plurality of elements being of at least two different types, each type differing in a height of its gap; and

    a driving mechanism to drive the plurality of elements to a driven state, wherein one of the layers of each element is electrostatically displaced relative to the other layer to close the gap between the layers, and wherein a minimum voltage required to actuate the driving mechanism is substantially different for each type of element.

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