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Silicon flexure suspension for single degree or freedom floated gyroscope

  • US 6,575,032 B2
  • Filed: 07/27/2001
  • Issued: 06/10/2003
  • Est. Priority Date: 07/27/2001
  • Status: Expired due to Fees
First Claim
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1. A flexure suspension for a gyroscopic float assembly for an accelerometer, comprising:

  • a hub;

    an outer rim;

    a plurality of flexure beams having a first end connected to the outer rim and a second end connected to the hub;

    a plurality of flexure tabs extending outward from outer perimeter portions of the outer rim;

    a plurality of stops formed in inner perimeter portions of the rim and arranged to constrain the flexure suspension against rotation about a selected axis; and

    a plurality of strain relief passages formed in the outer rim and arranged to provide relief from thermally induced stress.

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