Scribing sapphire substrates with a solid state UV laser

  • US 6,580,054 B1
  • Filed: 07/30/2002
  • Issued: 06/17/2003
  • Est. Priority Date: 06/10/2002
  • Status: Active Grant
First Claim
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1. A method for manufacturing die from a sapphire substrate, comprising;

  • mounting the sapphire substrate on a stage;

    directing pulses of laser energy at a surface of the sapphire substrate using a solid state laser, the pulses having a wavelength below about 560 nanometers, an energy density, a spot size, a repetition rate and a pulse duration to couple laser energy directly into said sapphire substrate by absorption sufficient to induce ablation of sapphire; and

    causing the pulses to impact the sapphire substrate in a scribe pattern to cut scribe lines in the sapphire substrate.

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