Micromachined apparatus for improved reflection of light

• US 6,585,383 B2
• Filed: 05/18/2000
• Issued: 07/01/2003
• Est. Priority Date: 05/18/2000
• Status: Expired due to Term

• Current Assignee: Calient Networks Incorporated
• Original Assignee: Calient Networks Incorporated
• Inventors: Helkey, Roger Jonathan
• Primary Examiner(s): SIKDER, MOHAMMAD YUNUS
• Application Number:
  US09/574,660
• Publication Number:
  US 20010055166A1
• Time in Patent Office: 1,139 Days
• Field of Search: 359/871, 359/872, 359/873, 359/874, 359/875, 359/876, 359/877, 359/881, 359/220, 359/221, 359/224, 359/225, 359/226, 359/850
• US Class Current: 359/871
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively close to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.

Claims

1. A micromachined apparatus for reflecting light, comprising:

a support structure; and

a plurality of mirrors each being pivotally secured to the support structure, a first to a third adjacent ones of the mirrors being located at comers of a first triangle, each corner being less than 90°

.

2. An apparatus according to claim 1 wherein the mirrors are located at corners of a plurality of contiguous triangles, each triangle having three corners, each of which is less than 90°

.

3. An apparatus according to claim 1 further comprising a plurality of support frames, each support frame being pivotally secured to the support structure, the first, second and third mirrors being secured to a first, second, and third of the support frames, respectively.

4. An apparatus according to claim 3 wherein the third support frame is partially located between the first and second support frames.

5. An apparatus according to claim 4 wherein a respective mirror pivots relative to a respective support frame about a respective mirror pivot axis, the mirror pivot axis about which the third mirror pivots being located between the mirror pivot axes about which the first and second mirrors pivot.

6. An apparatus according to claim 1 further comprising an electrostatic barrier structure located between the first and second, the first and third, and the second and third mirrors.