Self aligning non contact shadow ring process kit

  • US 6,589,352 B1
  • Filed: 12/10/1999
  • Issued: 07/08/2003
  • Est. Priority Date: 12/10/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. An apparatus for processing substrates, comprising:

  • a chamber;

    a substrate support disposed in the chamber;

    a first edge ring disposed on the substrate support, wherein the first edge ring comprises one or more tapered recesses and one or more slots; and

    a second edge ring having two or more matching tapered pins disposed thereon for mating engagement with the recesses and slots of the first edge ring.

View all claims

    Thank you for your feedback