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Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods

  • US 6,590,267 B1
  • Filed: 09/14/2000
  • Issued: 07/08/2003
  • Est. Priority Date: 09/14/2000
  • Status: Expired due to Fees
First Claim
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1. A MEMS (Micro Electro Mechanical System) valve driven by electrostatic forces, comprising:

  • a substrate defining a generally planar surface having an aperture therethrough;

    a substrate electrode disposed upon said substrate;

    a non-hinged, moveable membrane generally overlying said substrate electrode and said aperture, the membrane comprising an electrode element and a biasing element, wherein the moveable membrane includes a fixed portion attached directly to the generally planar surface of said substrate and a flap-like distal portion extending from the fixed portion, the distal portion being biased to at least partially curl in a non-actuated state and moveable with respect to said substrate electrode; and

    at least one resiliently compressible dielectric layer disposed between said substrate electrode and said membrane electrode element, wherein said moveable membrane responds to a voltage differential established between said substrate electrode and said moveable membrane electrode to move said membrane toward said aperture to seal said aperture so as to prevent flow therethrough.

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