Active vibration isolation system having pressure control

• US 6,590,639 B1
• Filed: 09/15/2000
• Issued: 07/08/2003
• Est. Priority Date: 09/15/2000
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Lee, Martin, Binnard, Michael, Yuan, Bausan
• Primary Examiner(s): Adams, Russell
• Assistant Examiner(s): Kim, Peter B.
• Application Number:
  US09/663,184
• Time in Patent Office: 1,026 Days
• Field of Search: 355/75, 355/53, 406/34, 267/136, 248/550
• US Class Current: 355/75
• CPC Class Codes: G03F 7/70825 Mounting of individual elements, e.g. mounts, holders or supports workpiece or mask holders G03F7/707
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

An active vibration isolation system includes a pneumatic control system and an electronic control system. The pneumatic control system supports a mass sensitive to vibration and isolates the mass from high frequency external disturbances. The electronic control system isolates the mass from low frequency external disturbances. The pneumatic control system includes a compliance chamber filled with a fluid to pneumatically support the mass, apparatus for directly measuring a pressure level in the compliance chamber, and apparatus for controlling the pressure level to minimize the effects of pressure variation in the compliance chamber. The measuring apparatus includes an instrument to measure an absolute pressure level of the compliance chamber or an instrument to measure a differential pressure level between the compliance chamber and a reference chamber having a predetermined pressure level.

Claims

1. A pneumatic control system to support a mass in a vibration isolation system, comprising:

a compliance chamber filled with a fluid to pneumatically support the mass, the fluid having a fluctuating pressure level caused by external disturbances;

a sensor device connected to the compliance chamber, the sensor device determining a pressure information of the compliance chamber by directly measuring the pressure level in the compliance chamber; and

a controller connected to the sensor device, the controller controlling the pressure level in the compliance chamber in response to the pressure information to minimize the effects of fluctuating pressure level in the compliance chamber.

2. The pneumatic control system of claim 1, wherein the controller comprises:

a feedback control system that generates a feedback control pressure signal based on the pressure information; and

a pressure control actuator connected to the compliance chamber and the feedback control system, the pressure control actuator controlling the pressure level in the compliance chamber in response to the feedback control pressure signal so that the pressure level in the compliance chamber equals a desired value.

3. The pneumatic control system of claim 2, further comprising:

a feedforward control system to determine a required pressure level of the compliance chamber as determined from a remote source; and

a summing junction connected to the feedforward control system and the feedback control system, the summing junction calculating the sum of the required pressure level from the feedforward control system and the feedback control pressure signal from the feedback control system;

wherein the pressure control actuator uses the summed pressure level to control the pressure level in the compliance chamber.

4. The pneumatic control system of claim 1, wherein the sensor device comprises:

a reference chamber filled with fluid having a predetermined pressure level; and

a differential pressure sensor connected between the compliance chamber and the reference chamber, the differential pressure sensor measuring a differential pressure level between the compliance chamber and the reference chamber.

5. The pneumatic control system of claim 4, wherein the sensor device further comprises:

a reference valve connected between the reference chamber and the compliance chamber, the reference valve being open during initiation to equalize the fluid pressure in the pneumatic control system, and being closed during operation.

6. A lithography system comprising a pneumatic control system as claimed in claim 1.

7. An object on which an image has been formed by the lithography system of claim 6.

8. A pneumatic control device to support a mass in a vibration isolation system, comprising:

a compliance chamber filled with a fluid to pneumatically support the mass;

a pressure sensor connected to the compliance chamber, the pressure sensor measuring a pressure level in the compliance chamber and for outputting a pressure information of the compliance chamber;

a feedback control system connected to the pressure sensor, the feedback control system receiving the pressure information and generating a feedback control pressure signal; and

a pressure control actuator connected to the compliance chamber and the feedback control system, the pressure control actuator controlling the pressure level in the compliance chamber in response to the feedback control pressure signal,

wherein the pressure control actuator comprises a fluid supply connected to the compliance chamber via a regulator that controls the amount of fluid flowing into and out of the compliance chamber in response to the pressure information of the compliance chamber, and

wherein the regulator is an electropneumatic valve to control the fluid when the fluid pressure has a large amplitude and a low frequency variation.

9. A lithography system comprising a pneumatic control device as claimed in claim 8.

10. An object on which an image has been formed by the lithography system of claim 9.

11. The pneumatic control device of claim 8, wherein the pressure control actuator comprises:

one of a bellows and a piston connected to the compliance chamber.

12. The pneumatic control device of claim 11, wherein the one of a bellows and a piston is connected to an electromagnetic actuator, the one of a bellows and a piston controlling a volume of the compliance chamber when the fluid pressure has a small amplitude and a high frequency variation.

13. The pneumatic control device of claim 8, further comprising:

a feedforward control system that determines a required pressure level of the compliance chamber based on a position information of the mass; and

a summing junction connected to the feedforward control system and the feedback control system, the summing junction calculating the sum of the required pressure level from the feedforward control system and the feedback control pressure signal from the feedback control system;

wherein the pressure control actuator uses the summed pressure level to control the pressure level in the compliance chamber.

14. A pneumatic control device of claim 13, wherein the position information of the mass is a position of a center of gravity of the mass.

15. A pneumatic control device to support a mass in a vibration isolation system, comprising:

a compliance chamber filled with a fluid pneumatically supporting the mass, the fluid having a fluctuating pressure level due to vibration of the mass;

a reference chamber filled with the fluid having a predetermined pressure level; and

a differential pressure sensor connecting the compliance chamber to the reference chamber, and measuring a differential pressure level between the compliance chamber and the reference chamber,

wherein the differential pressure level is used to control the fluctuating pressure level in the compliance chamber so that the fluctuating pressure level is substantially eliminated.

16. The pneumatic control device of claim 15, further comprising:

a reference valve connected between the reference chamber and the compliance chamber, the reference valve being open during initiation to equalize the fluid pressure in the pneumatic control device, and being closed during operation.

17. The pneumatic control device of claim 15, further comprising:

a feedback control system, connected to the differential pressure sensor, for receiving the differential pressure level and adjusting the pressure level in the compliance chamber; and

a pressure control actuator, connected to the compliance chamber and the feedback control system, the pressure control actuator for controlling the pressure level in the compliance chamber so that the differential pressure level equals a desired value.

18. The pneumatic control device of claim 15, further comprising:

a damping device connected to the compliance chamber and a fluid supply, the damping device controlling the fluid flowing into and out of the compliance chamber to reduce the fluctuating pressure level in the compliance chamber.

19. The pneumatic control device of claim 18, wherein the damping device comprises:

a damping chamber filled with the fluid;

a restriction connected to the compliance chamber and the damping chamber, the restriction for controlling the fluid flowing between the damping chamber and the compliance chamber so that the fluctuating pressure level is minimized; and

a fluid supply regulator connected to the damping chamber and the fluid supply, the fluid supply regulator for controlling the fluid flowing between the damping chamber and the fluid supply so that the pressure level in the compliance chamber can be controlled.

20. A lithography system comprising a pneumatic control device as claimed in claim 15.

21. An object on which an image has been formed by the lithography system of claim 20.

22. A method for pneumatically controlling vibration of a mass caused by external disturbances, the mass being pneumatically supported by a compliance chamber filled with a fluid, the method comprising the steps of:

directly measuring a pressure level in the compliance chamber; and

controlling the pressure level to minimize the effects of fluctuating pressure level in the compliance chamber.

23. The method of claim 22, wherein the measuring step comprises:

measuring an absolute pressure level in the compliance chamber.

24. The method of claim 22, wherein the measuring step comprises:

measuring a differential pressure level between the compliance chamber and a reference chamber, the reference chamber having a predetermined pressure level.

25. The method of claim 22, wherein the controlling step comprises:

actuating a pressure control actuator to control the fluid flowing into and out of the compliance chamber so that the pressure level in the compliance chamber equals a desired value.

26. The method of claim 22, further comprising a step of:

determining a calculated pressure level required to compensate for the external disturbances; and

determining a difference between the measured pressure level and the calculated pressure level to control the pressure level in the compliance chamber.

27. A method of operating an exposure apparatus to transfer a pattern of a reticle onto a substrate, the apparatus having a projection optical system, a first stage system arranged to be movable with respect to the projection optical system for mounting said reticle thereon, a second stage system arranged to be movable with respect to the projection optical system for mounting the substrate thereon, and a vibration isolation device that supports at least one of the projection optical system, the first stage system and the second stage system pneumatically by a compliance chamber, the method comprising:

controlling the vibration isolation device by utilizing the method of claim 22 to control vibration of any of the system supported by the vibration isolation device.

28. A method for making an object on which an image has been formed by utilizing the method of operating an exposure apparatus of claim 27.

29. A pneumatic control device to support a mass in a vibration isolation system, comprising:

a compliance chamber filled with a fluid to pneumatically support the mass;

a pressure sensor connected to the compliance chamber, the pressure sensor measuring a pressure level in the compliance chamber and for outputting a pressure information of the compliance chamber;

a feedback control system connected to the pressure sensor, the feedback control system receiving the pressure information and generating a feedback control pressure signal; and

a pressure control actuator connected to the compliance chamber and the feedback control system, the pressure control actuator controlling the pressure level in the compliance chamber in response to the feedback control pressure signal,

wherein the pressure control actuator comprises one of a bellows and a piston connected to the compliance chamber, and

wherein the one of a bellows and a piston is connected to an electromagnetic actuator, the one of a bellows and a piston controlling a volume of the compliance chamber when the fluid pressure has a small amplitude and a high frequency variation.