Micromechanical optical switch

• US 6,597,491 B2
• Filed: 08/22/2002
• Issued: 07/22/2003
• Est. Priority Date: 08/01/2000
• Status: Expired due to Fees

• Current Assignee: Cheetah Omni LLC
• Original Assignee: Cheetah Omni LLC
• Inventors: Islam, Mohammed N., Kuditcher, Amos
• Primary Examiner(s): Dang, Hung Xuan
• Assistant Examiner(s): Spector, David N.
• Application Number:
  US10/227,056
• Publication Number:
  US 20030035194A1
• Time in Patent Office: 334 Days
• Field of Search: 359/139, 359/291, 359/578, 359/583, 359/589, 385/16, 385/47
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/3516 the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/3546 NxM switch, i.e. a regular array of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams

Abstract

An optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed outwardly from the fixed layer. The moveable mirror assembly is operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly. In a particular embodiment, the movable mirror assembly includes an inner strip spaced apart from the fixed layer by a first distance and an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance. The optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.

Claims

1. An optical communication device comprising:

a circulator operable to receive an input optical signal;

a first receiver coupled to a first output of the circulator;

a second receiver coupled to a second output of the circulator; and

an optical switching element coupled between the circulator and the second receiver, the optical switching element operable to selectively communicate the optical signal for receipt by the first or second receiver depending on an application of a control signal to the switching element;

wherein the optical switching element comprises;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in an optical characteristic of the optical cavity.

2. An optical processing device comprising:

a demultiplexer operable to receive a multiple wavelength input optical signal and to separate the multiple wavelength signal into a plurality of wavelength signals; and

an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the is fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in an optical characteristic of the optical cavity;

wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage.

3. The optical processing device of claim 2, further comprising a multiplexer operable to receive the at least some of the plurality of wavelength signals from the array and to combine those signals into a multiple wavelength output optical signal.

4. The optical processing device of claim 2, wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state at a rate associated with an average size of a packet traversing the communication element.

5. The optical processing device of claim 2, wherein the fixed layer comprises a fixed mirror layer and wherein the optical cavity comprises a Fabry-Perot cavity.

6. The optical processing device of claim 2, wherein the optical communication element operates to substantially transmit an optical signal received when no voltage is applied and to substantially reflect the optical signal received when the voltage is applied.

7. An optical processing device comprising:

an optical tap operable to split off at least a portion of the optical signal;

a demultiplexer operable to receive the at least a portion of the optical signal and to separate the at least a portion of the optical signal into a plurality of wavelength signals; and

an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in an optical characteristic of the optical cavity;

wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage.

8. The optical processing device of claim 7, further comprising a multiplexer operable to receive the at least some of the plurality of wavelength signals from the array and to combine those signals into a multiple wavelength output optical signal.

9. The optical processing device of claim 7, further comprising an optical amplifier operable to amplify the multiple wavelength signal.

10. The optical processing device of claim 7, wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state at a rate associated with an average size of a packet traversing the communication element.

11. The optical processing device of claim 7, wherein the fixed layer comprises a fixed mirror layer and wherein the optical cavity comprises a Fabry-Perot cavity.

12. The optical processing device of claim 7, wherein the optical communication element operates to substantially transmit an optical signal received when no voltage is applied and to substantially reflect the optical signal received when the voltage is applied.

13. An optical communication device comprising:

a circulator operable to receive an input optical signal;

a first receiver coupled to a first output of the circulator;

a second receiver coupled to a second output of the circulator; and

an optical switching element coupled between the circulator and the second receiver, the optical switching element operable to selectively communicate the optical signal for receipt by the first or second receiver depending on an application of a control signal to the switching element;

wherein the optical switching element comprises;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical communication device.

14. An optical processing device comprising:

a demultiplexer operable to receive a multiple wavelength input optical signal and to separate the multiple wavelength signal into a plurality of wavelength signals; and

an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device;

wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage.

15. The optical processing device of claim 14, further comprising a multiplexer operable to receive the at least some of the plurality of wavelength signals from the array and to combine those signals into a multiple wavelength output optical signal.

16. The optical processing device of claim 14, wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state at a rate associated with an average size of a packet traversing the communication element.

17. The optical processing device of claim 14, wherein the optical communication element operates to substantially transmit an optical signal received when no voltage is applied and to substantially reflect the optical signal received when the voltage is applied.

18. An optical processing device comprising:

an optical tap operable to split off at least a portion of the optical signal;

a demultiplexer operable to receive the at least a portion of the optical signal and to separate the at least a portion of the optical signal into a plurality of wavelength signals; and

an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device;

wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage.

19. The optical processing device of claim 18, further comprising a multiplexer operable to receive the at least some of the plurality of wavelength signals from the array and to combine those signals into a multiple wavelength output optical signal.

20. The optical processing device of claim 18, further comprising an optical amplifier operable to amplify the multiple wavelength signal.

21. The optical processing device of claim 18, wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state at a rate associated with an average size of a packet traversing the communication element.

22. The optical processing device of claim 18, wherein the optical communication element operates to substantially transmit an optical signal received when no voltage is applied and to substantially reflect the optical signal received when the voltage is applied.

23. An optical processing device comprising:

a demultiplexer operable to receive a multiple wavelength input optical signal and to separate the multiple wavelength signal into a plurality of wavelength signals; and

an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device.

24. The optical processing device of claim 23, further comprising a multiplexer operable to receive the at least some of the plurality of wavelength signals from the array and to combine those signals into a multiple wavelength output optical signal.

25. The optical processing device of claim 23, wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage.

26. The optical processing device of claim 23, wherein the optical communication element is operable to change between a substantially reflective state and a less than substantially reflective state in response to the applied voltage.

27. The optical processing device of claim 23, wherein the fixed layer comprises a fixed mirror layer and wherein the cavity comprises a Fabry-Perot cavity.

28. An optical processing device comprising:

an optical tap operable to split off at least a portion of the optical signal;

a demultiplexer operable to receive the at least a portion of the optical signal and to separate the at least a portion of the optical signal into a plurality of wavelength signals; and

an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;

a fixed layer disposed outwardly from a substrate; and

a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device.

29. The optical processing device of claim 28, further comprising a multiplexer operable to receive the at least some of the plurality of wavelength signals from the array and to combine those signals into a multiple wavelength output optical signal.

30. The optical processing device of claim 28, further comprising an optical amplifier operable to amplify the multiple wavelength signal.

31. The optical processing device of claim 28, wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage.

32. The optical processing device of claim 28, wherein the optical communication element is operable to change between a substantially reflective state and a less than substantially reflective state in response to the applied voltage.

33. The optical processing device of claim 28, wherein the fixed layer comprises a fixed mirror layer and wherein the cavity comprises a Fabry-Perot cavity.