Micromachined apparatus for improved reflection of light

• US 6,612,706 B2
• Filed: 07/27/2001
• Issued: 09/02/2003
• Est. Priority Date: 05/18/2000
• Status: Expired due to Term

• Current Assignee: Calient Networks Incorporated
• Original Assignee: Calient Networks Incorporated
• Inventors: Helkey, Roger Jonathan
• Primary Examiner(s): SIKDER, MOHAMMAD YUNUS
• Application Number:
  US09/917,420
• Publication Number:
  US 20020044365A1
• Time in Patent Office: 767 Days
• Field of Search: 359/871, 359/872, 359/879, 359/224, 359/290, 359/291, 359/295, 359/298, 310/328, 310/333, 310/359, 310/366
• US Class Current: 359/871
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A micromachined apparatus for reflecting light is described that is designed to reduce losses in quality or intensity of light. Mirrors are used having lengths that are longer than their widths to reduce clipping of light when a mirror is located at an angle with respect to light falling thereon. Relatively long mirror torsion components are used to reduce forces required to pivot the mirrors. Regardless of the dimensions of the mirrors and the use of long torsion components, the mirrors are still located relatively close to one another. The relatively close positioning of the mirrors is due to a combined use of notches formed in support frames to which the torsion components are secured, oval shapes of the mirrors which take up less space than rectangular shapes, matching oval openings in the support frames, and the arrangement of the support frames in a non-rectangular array wherein tips of the support frames are located between one another.

Claims

1. A micromachined apparatus for reflecting light, the apparatus comprising:

a substrate;

a support structure secured to the substrate;

a mirror support frame defining a recess, wherein the mirror support frame includes a first pair of aligned mounting notches which open into the recess and extend into the mirror support frame, the first pair of mounting notches being disposed on a first axis;

a mirror mounted in the recess at a predetermined minimum spacing from the mirror support frame; and

a pair of mirror torsion connectors mounting the mirror in the recess, each mirror torsion connector having a length which is greater than the predetermined minimum spacing and which extends into one of the axially-aligned mounting notches, wherein pivoting of the mirror causes torsional deflection of the torsion connector.

2. The micromachined apparatus of claim 1, wherein the mirror support frame includes a second pair of aligned mounting notches disposed on a second axis and formed in an end of the support frame remote from the recess, and wherein the mirror support frame is pivotally mounted to the support structure via a pair of frame torsion connectors, each frame torsion connector extending from the support structure into a corresponding one of the second pair of mounting notches.

3. The micromachined apparatus of claim 1 further comprising a plurality of mirrors and mirror support frames, wherein at least some of the mirrors are disposed on vertices of a triangle having angles between its sides of less than 90 degrees.

4. The micromachined apparatus of claim 3, wherein the triangle is an isosceles triangle having two long sides and a short side, and wherein each mirror has a long axis and a short axis transverse to the long axis, and wherein those mirrors that are spaced along a short side of an isosceles triangle have parallel long axes.

5. The micromachined apparatus of claim 1, wherein each mirror has a oval shape.

6. A micromachined apparatus for reflecting light, comprising:

a mirror support frame defining a recess;

a mirror mounted within the recess, the mirror defining an oval-shaped reflecting surface and being received with the recess with minimum clearance; and

a first pair of torsion connectors pivotally connecting the mirror to the support frame, the torision connectors having a length which is greater than the minimum clearance, wherein the mirror support frame has a pair of axially aligned inwardly extending first notches within which a substantial portion of the first torsion connectors extend.

7. The micromachined apparatus of claim 6, further comprising:

a support structure defining an opening; and

a second pair of torsion connectors pivotally connecting the mirror support frame to the support structure, the mirror support frame being received in the opening with minimum clearance.

8. The micromachined apparatus of claim 6, wherein the mirror support frame comprises a pair of axially aligned outwardly extending second notches, within which a portion of the second pair of torsion connectors extend.