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Process for manufacture of micro electromechanical devices having high electrical isolation

  • US 6,617,657 B1
  • Filed: 11/09/2000
  • Issued: 09/09/2003
  • Est. Priority Date: 05/08/1998
  • Status: Expired due to Term
First Claim
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1. A microelectromechanical (MEM) device comprising:

  • a) a first substrate defining an upper surface that extends along a plane defined by a lateral direction and a longitudinal direction;

    b) a second substrate including;

    i. first and second longitudinal outer members disposed at opposing longitudinal outer ends of the second substrate and permanently connected to the upper surface of the first substrate; and

    ii. a central member connected between the first and second longitudinal outer members, wherein the central member has first and second lateral edges that define a thickness of the central member, the central member defining a void disposed between at least a portion of the central member and the upper surface of the first substrate, wherein the void is continuous between the first and second lateral outer edges of the central member.

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