High-absorption wide-band pixel for bolometer arrays

  • US 6,621,083 B2
  • Filed: 12/29/2000
  • Issued: 09/16/2003
  • Est. Priority Date: 12/29/2000
  • Status: Expired due to Term
First Claim
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1. An imaging detector for infrared radiation in the approximate range of 6 to 18 micrometers, comprising an array of pixels on a common substrate, each pixel comprising:

  • a thermally isolated absorber platform having a thickness equal to or less than approximately 0.5 micrometer and a layer of metal, and separated from the substrate by a gap in the approximate range of 0.8 to 2.5 micrometers;

    a temperature-dependent resistor disposed on the platform and having at least one pair of opposite sides;

    a reflective layer on the substrate;

    a set of conductors electrically coupled to the resistor along a substantial portion of the length of the opposite sides.

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