Article for use in a semiconductor processing chamber and method of fabricating same

• US 6,632,325 B2
• Filed: 02/07/2002
• Issued: 10/14/2003
• Est. Priority Date: 02/07/2002
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lingampalli, Ramkishan Rao
• Primary Examiner(s): Lund, Jeffrie R.
• Assistant Examiner(s): Zervigon, Rudy
• Application Number:
  US10/072,792
• Publication Number:
  US 20030148035A1
• Time in Patent Office: 614 Days
• Field of Search: 156/345.51, 118/728, 118/500
• US Class Current: 156/345.51
• CPC Class Codes: C23C 4/00 Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge build-up welding B23K, e.g. B23K5/18, B23K9/04
• CPC Class Codes: C23C 4/04 characterised by the coating material
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions
• CPC Class Codes: H01L 21/68757 characterised by a coating or a hardness or a material
• CPC Class Codes: Y10T 428/218 Aperture containing
• CPC Class Codes: Y10T 428/24322 Composite web or sheet
• CPC Class Codes: Y10T 428/265 1 mil or less

Abstract

An article having a protective coating for use in semiconductor applications and method for making the same is provided. In one embodiment, a method of coating an aluminum surface of an article utilized in a semiconductor deposition chamber includes the steps of heating a coating material to a semi-liquidous state, the coating material comprising at least one material from the group consisting of aluminum fluoride and magnesium fluoride and depositing the heated coating material on the aluminum surface. The protective coating has a beta phase grain orientation of less than about 10 percent that has good adhesion to aluminum and resists cracking, flaking and peeling. Some articles that may be advantageously coated include showerheads, blocker plates, support assemblies and vacuum chamber bodies, among others.

Claims

1. A substrate support having an aluminum surface coated with aluminum fluoride, said aluminum fluoride coating applied by a method comprising heating aluminum fluoride to a semi-liquidous state and applying the heated aluminum fluoride to the aluminum surface.

2. The substrate support of claim 1, wherein the aluminum fluoride coating is about 12 to 25 μ

m thick.

3. The substrate support of claim 1, wherein the aluminum fluoride coating has less than 6 percent beta phase grain structure.

4. A substrate support having an aluminum surface coated with aluminum fluoride, said aluminum fluoride coating applied by a method comprising:

spraying aluminum fluoride powder having a grain orientation of at least 90 percent in the alpha phase through a plasma formed from an inert gas; and

depositing the sprayed aluminum fluoride on the aluminum surface, wherein the deposited aluminum fluoride has less than 10 percent beta phase grain structure.

5. The substrate support of claim 4, wherein plasma is at a temperature of between 1450 and 1600 degrees Celsius.

6. The substrate support of claim 4, wherein the deposited aluminum fluoride coating is about 12 to 25 μ

m thick.

7. The substrate support of claim 4, wherein the aluminum fluoride coating has a beta phase grain structure of less than 6 percent.

8. A substrate support comprising:

a support body having an aluminum surface;

a heating element disposed in the support body; and

a coating comprising an aluminum fluoride or magnesium fluoride layer applied in a semi-liquid, semi-solid state to the aluminum surface.

9. A substrate support comprising:

a support body having an aluminum first surface and an opposing second surface;

a heating element disposed in the support body;

a passage formed through the support body between the first surface ad the second surface, and adapted to evacuate a region between the first surface of the support body and a substrate positioned thereon; and

a coating comprising an aluminum fluoride layer applied in a semi-liquid, semi-solid state to the aluminum surface and having less than 10 percent beta phase grain structure.

10. The substrate support of claim 9 further comprising:

at least one purge gas channel formed through the support body between the second surface and a side of the support body.