Silicon strain gage having a thin layer of highly conductive silicon

  • US 6,635,910 B1
  • Filed: 07/22/1999
  • Issued: 10/21/2003
  • Est. Priority Date: 07/22/1999
  • Status: Expired due to Term
First Claim
Patent Images

1. A force measuring and detecting device comprising:

  • a force responsive member; and

    a semiconductor strain gage attached to the force responsive member, the strain gage measuring forces applied to the force responsive member, the strain gage including an electrically resistive substrate layer and a layer of electrically conductive silicon disposed on the substrate layer, wherein the substrate layer has a thickness of about 8-10 microns.

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