Miniature ultrasound transducer

• US 6,641,540 B2
• Filed: 09/06/2001
• Issued: 11/04/2003
• Est. Priority Date: 12/01/2000
• Status: Expired due to Term

• Current Assignee: Cleveland Clinic Foundation
• Original Assignee: Cleveland Clinic Foundation
• Inventors: Fleischman, Aaron J., Roy, Shuvo, Lockwood, Geoffrey R.
• Primary Examiner(s): Lateef, Marvin M.
• Assistant Examiner(s): Jung, William C.
• Application Number:
  US09/948,068
• Publication Number:
  US 20020077551A1
• Time in Patent Office: 789 Days
• Field of Search: 600/437-472
• US Class Current: 600/459
• CPC Class Codes: B06B 1/0651 of circular shape
• CPC Class Codes: B06B 1/0688 with foil-type piezoelectric elements, e.g. PVDF

Abstract

An ultrasonic transducer (108) for use in medical imaging comprises a substrate (300) having first and second surfaces. The substrate (300) includes an aperture (301) extending from the first surface to the second surface. Electronic circuitry (302) is located on the first surface. A diaphragm (304) is positioned at least partially within the aperture (301) and in electrical communication with the electronic circuitry (302). The diaphragm (304) has an arcuate shape, formed by applying a differential pressure, that is a section of a sphere. A binder material (314) is in physical communication with the diaphragm (304) and the substrate (300).

Claims

1. An ultrasonic transducer for use in medical imaging, said ultrasonic transducer comprising:

a substrate having oppositely disposed first and second outer surfaces, said substrate including an aperture extending from said first outer surface to said second outer surface;

a diaphragm positioned at least partially within said aperture, said diaphragm having an arcuate shape that is a section of a sphere for focusing ultrasonic waves emitted from the diaphragm;

a plurality of electrodes in physical communication with said diaphragm; and

a binder material in physical communication with said diaphragm and said substrate.

2. The ultrasonic transducer of claim 1 wherein said diaphragm comprises a thin film piezoelectric material.

3. The ultrasonic transducer of claim 2 wherein said thin film piezoelectric material is a polyvinylidenefluoride film.

4. The ultrasonic transducer of claim 2, wherein said thin film piezoelectric material is film comprising polyvinylidenefluoride and trifluoroethylene.

5. The ultrasonic transducer of claim 1 wherein said diaphragm comprises a free-standing film.

6. The ultrasonic transducer of claim 1 wherein said binding material comprises a conductive material.

7. The ultrasonic transducer of claim 1 wherein said binding material comprises a non-conductive material.

8. The ultrasonic transducer of claim 1 wherein said binder material is located at least partially within said aperture, said binder material abutting and supporting said diaphragm and attenuating sound waves generated by said diaphragm.

9. The ultrasonic transducer of claim 1 wherein said diaphragm has a thickness between 1000 angstroms and 100 microns.

10. The ultrasonic transducer of claim 9 wherein said diaphragm has a thickness of approximately five to fifteen micrometers.

11. The ultrasonic transducer of claim 1 wherein at least one of said plurality of electrodes is an annular electrode formed on a surface of said diaphragm and operative to further focus emitted sound waves.

12. The ultrasonic transducer of claim 1 wherein said diaphragm resonates at a frequency between 30 and 120 Mhz.

13. The ultrasonic transducer of claim 1 wherein said first surface of said substrate comprises a surface area of about 1 mm².

14. The ultrasonic transducer of claim 1 wherein said substrate is fabricated from silicon.

15. A method for forming an ultrasonic transducer comprising the steps of:

providing a silicon substrate, having oppositely disposed first and second outer surfaces;

creating an aperture in the substrate extending from the first surface to the second surface via a micromachining, microfabrication, or MEMS fabrication process;

covering the aperture with a film;

forming a plurality of electrodes in physical communication with the film via a micromachining, microfabrication, or MEMS fabrication process;

applying a differential pressure across the film to form a diaphragm having a shape that is a section of a sphere; and

applying binding material to the diaphragm to maintain the spherical section shape of the diaphragm.

16. The method of claim 15 wherein the electrodes are formed via surface micromachining.

17. The method of claim 15 wherein the aperture is provided via deep reactive ion etching.

18. The method of claim 15 wherein the step of applying binding material is done before the differential pressure is applied.

19. The method of claim 15 wherein the step of applying binding material is done after the differential pressure is applied.

20. The method of claim 15 further comprising the step of:

forming at least one annular electrode on a surface of the diaphragm.

21. The method of claim 15 further comprising the step of:

rendering the diaphragm piezoelectric.

22. The method of step 21 where the step of rendering the diaphragm piezoelectric comprises corona discharge polling of the diaphragm.

23. A medical device for insertion into a mammalian body, said medical device comprising:

an insertable body portion; and

an ultrasonic transducing section on said insertable body portion, said ultrasonic transducing section having at least one ultrasonic transducer, each of said at least one ultrasonic transducer comprising;

a substrate having oppositely disposed first and second outer surfaces, said substrate including an aperture extending from said first outer surface to said second outer surface;

a diaphragm positioned at least partially within said aperture, said diaphragm having an arcuate shape that is a section of a sphere for focusing ultrasonic waves emitted from said diaphragm;

a plurality of electrodes in physical communication with said diaphragm; and

a binder material in physical communication with said diaphragm and said substrate.

24. The medical device of claim 23 wherein said diaphragm comprises a thin film piezoelectric material.

25. The medical device of claim 24, wherein said thin film piezoelectric material is a polyvinylidenefluoride film.

26. The medical device of claim 24, wherein said thin film piezoelectric material is a film comprising polyvinylidenefluoride and trifluoroethylene.

27. The medical device of claim 23 wherein said diaphragm comprises a free-standing film.

28. The medical device of claim 23 wherein said binding material comprises a conductive material.

29. The medical device of claim 23 wherein said binding material comprises a non-conductive material.

30. The medical device of claim 23 wherein at least one of said plurality of electrodes is an annular electrode formed on a surface of said diaphragm and operative to further focus sound waves emitted by said at least one transducer.

31. The medical device of claim 23 wherein said binder material is located at least partially within said aperture, said binder material abutting and supporting said diaphragm and attenuating sound waves generated by said diaphragm.

32. The medical device of claim 23 wherein said first surface of said substrate comprises a surface area of about 1 mm².

33. The medical device of claim 23 wherein said substrate is fabricated from silicon.