Optical switch having switch mirror arrays controlled by scanning beams

• US 6,643,425 B1
• Filed: 08/17/2000
• Issued: 11/04/2003
• Est. Priority Date: 08/17/2000
• Status: Expired due to Term

• Current Assignee: Calient Networks Incorporated
• Original Assignee: Calient Networks Incorporated
• Inventors: Bowers, John, Helkey, Roger, White, Kevin, Pusarla, Chandrasekhar, Welsh, David, Blumenthal, Dan, Chong, John
• Primary Examiner(s): Sanghavi, Hemang
• Assistant Examiner(s): KNAUSS, SCOTT A
• Application Number:
  US09/642,241
• Time in Patent Office: 1,174 Days
• Field of Search: 385/16-19, 359/293, 359/224
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/359 of the position of the moving element itself during switching, i.e. without monitoring the switched beams
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

An optical switch having switch mirror arrays controlled by scanning beams that reduce the amount of electrical connections required and reduce the complexity for constructing large optical switches. Movement of the switch mirror arrays is controlled by one or more scanning beams. The optical switch includes one or more arrays of optical switch inputs and outputs and one or more arrays of movable mirrors to direct light beams from the optical switch inputs to the optical switch outputs. The optical switch also includes one or more control elements to control the movable mirrors based on scanning beams directed to the one or more control elements.

Claims

1. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct light beams from the optical switch inputs to the optical switch outputs, wherein the one or more arrays of movable mirrors are separate from the one or more arrays of optical switch inputs and outputs; and

one or more control elements to control the movable mirrors based on electron beams directed to the control elements.

2. The optical switch of claim 1, wherein the electron beams are directed to the control elements in free space.

3. The optical switch of claim 1, wherein each of the one or more control elements comprises one or more conductive pads.

4. The optical switch of claim 1, further comprising:

an electron gun to output the electron beams; and

a deflector to direct the electron beams to the control elements.

48. The optical switch of claim 1, wherein the one or more control elements are positioned at the ends of one or more rows of movable mirrors of one or more arrays of movable mirrors.

49. The optical switch of claim 1, wherein the one or more control elements are positioned in between the movable mirrors of one or more arrays of movable mirrors.

5. A method, comprising:

generating one or more electron beams; and

controlling movement of one or more movable switch mirrors using the one or more electron beams by outputting one of the electron beams to one of the or more control elements coupled to an electrode.

6. The method of claim 5, wherein the electrode is positioned under one of the movable switch mirrors.

7. The method of claim 5, further comprising generating a drive voltage for the electrode.

8. The method of claim 5, wherein outputting the electron beams to one or more control elements includes outputting the electron beams in free space to the control elements.

9. The method of claim 5, wherein controlling movement of the one or more movable switch mirrors includes changing a position of the movable switch mirrors from an equilibrium position.

10. An optical switch, comprising:

an optical source to provide an optical beam;

a diffraction beam splitter to receive the optical beam from the optical source and to split the optical beam into multiple beams; and

a spatial light modulator to direct the multiple beams to a switch mirror array, the switch mirror array having one or more control elements, each of the one or more control elements coupled to receive one of the multiple beams, each control element to control movement of an individual mirror based on the correspondingly received one of the multiple beams.

11. The optical switch of claim 10, wherein the spatial light modulator varies the intensity of one or more of the multiple beams.

12. The optical switch of claim 10, wherein the optical source comprises a continuous wave optical source.

13. The optical switch of claim 12, wherein the optical beam comprises a continuous wave optical beam.

14. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein the control beams and the signal beams follow substantially parallel paths over substantially similar distances between the optical switch inputs and the movable mirrors.

15. The optical switch of claim 14, wherein the paths of the control beams are separate from the paths of the signal beams between the optical switch inputs and the movable mirrors.

16. The optical switch of claim 14, wherein the control beams are directed to places other than the movable mirrors.

17. The optical switch of claim 14, wherein each of the control elements is integrated with one or more of the movable mirrors.

18. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein the paths of the control beams are separate from the paths of the signal beams between the optical switch inputs and the movable mirrors, wherein the control beams are directed to places other than the movable mirror and, wherein the movable mirrors do not reflect the control beams.

19. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein the paths of the control beams are separate from the paths of the signal beams between the optical switch inputs and the movable mirrors, wherein the movable mirrors are outside the paths of the control beams.

20. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein the paths of the control beams are separate from the paths of the signal beams between the optical switch inputs and the movable mirrors, wherein each of one or more control elements provides a drive voltage to each of one or more electrodes upon receipt of a control beam by the control element.

21. The optical switch of claim 20, wherein each electrode moves one or more movable mirrors in a certain direction upon receipt of the drive voltage by the electrode.

22. An optical switch comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs, wherein an array of movable mirrors is formed on a common substrate;

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein each of the control elements is integrated with one or more of the movable mirrors.

23. The optical switch of claim 22, wherein the paths of the control beams are separate from the paths of the signal beams between the optical switch inputs and the movable mirrors.

24. The optical switch of claim 22, wherein the control beams are directed to places other than the movable mirrors.

25. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein the control beams and the signal beams follow substantially parallel paths between the optical switch inputs and the movable mirrors, wherein a receiving surface of each control element is coplanar with a receiving surface of one or more movable mirrors when the movable mirrors are in the equilibrium position.

26. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein the control beams and the signal beams follow substantially parallel paths between the optical switch inputs and the movable mirrors, wherein each of one or more control elements provides a drive voltage to each of one or more electrodes upon receipt of a control beam by the control element.

27. The optical switch of claim 26, wherein each electrode moves one or more movable mirrors in a certain direction upon receipt of the drive voltage by the electrode.

28. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein each of the control elements is integrated with one or more of the movable mirrors , wherein each of one or more control elements provides a drive voltage to one or more electrodes upon receipt of a control beam by the control element.

29. The optical switch of claim 28, wherein each electrode moves one or more movable mirrors in a certain direction upon receipt of the drive voltage by the electrode.

30. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein each of the one or more control elements provides a drive voltage to one or more electrodes upon receipt of a control beam by the control element.

31. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control elements to control the movable mirrors based on one or more control beams directed to the control elements, wherein each of the one or more control elements provides a drive voltage to one or more electrodes upon receipt of one of the control beams by the control element, wherein each electrode moves one or more movable mirrors in a certain direction upon receipt of the drive voltage by the electrode.

32. The optical switch of claim 31, wherein each of the control elements is integrated with one or more of the movable mirrors.

33. The optical switch of claim 31, wherein the paths of the control beams are separate from the paths of the signal beams between the optical switch inputs and the movable mirrors.

34. The optical switch of claim 33, wherein the control beams and the signal beams follow substantially parallel paths between the optical switch inputs and the movable mirrors.

35. The optical switch of claim 31, wherein the control beams are directed to places other than the movable mirrors.

36. An optical switch, comprising:

one or more arrays of optical switch inputs and outputs;

one or more arrays of movable mirrors to direct one or more signal beams from the optical switch inputs to the optical switch outputs; and

one or more control devices, wherein each control device moves one or more movable mirrors in a particular direction based on the intensity of one or more scanning control beams directed to the control device.

37. The optical switch of claim 36, wherein each of the one or more control devices comprises one or more electrodes.

38. The optical switch of claim 37, wherein an electrode moves one or more movable mirrors in a certain direction upon receipt of a scanning control beam by the electrode.

39. The optical switch of claim 38, wherein the electrode moves the one or more movable mirrors by electrostatic actuation.

40. The optical switch of claim 36, wherein each of the one or more control devices further comprises one or more control elements.

41. The optical switch of claim 40, wherein one or more of the control elements is a photodetector.

42. The optical switch of claim 40, wherein a control element provides a drive voltage to one or more electrodes upon receipt of a control beam by the control element.

43. The optical switch of claim 42, wherein each electrode moves one or more movable mirrors in a certain direction upon receipt of the drive voltage by the electrode.

44. The optical switch of claim 43, wherein each electrode moves the one or more movable mirrors by electrostatic actuation.

45. The optical switch of claim 36, wherein the paths of the scanning control beams are separate from the paths of the signal beams between the optical switch inputs and the movable mirrors.

46. The optical switch of claim 36, wherein the control beams and the signal beams follow substantially parallel paths between the optical switch inputs and the movable mirrors.

47. The optical switch of claim 40, wherein each of the control elements is integrated with one or more of the movable mirrors.