Container for treating with corrosive-gas and plasma and method for manufacturing the same

• US 6,645,585 B2
• Filed: 05/29/2001
• Issued: 11/11/2003
• Est. Priority Date: 05/30/2000
• Status: Expired due to Fees

• Current Assignee: Kyocera Corporation
• Original Assignee: Kyocera Corporation
• Inventors: Ozono, Shunichi
• Primary Examiner(s): Watkins, III, William P.
• Assistant Examiner(s): BRUENJES, CHRISTOPHER P
• Application Number:
  US09/870,282
• Publication Number:
  US 20020009560A1
• Time in Patent Office: 896 Days
• Field of Search: 428/34.6, 428/426, 428/432, 428/34.4, 428/141, 156/916, 156/914, 156/345.3, 204/298.3, 581/152, 581/127, 581/105, 581/153
• US Class Current: 428/34.4
• CPC Class Codes: B32B 1/00 Layered products having a non-planar shape
• CPC Class Codes: C04B 35/18 rich in aluminium oxide
• CPC Class Codes: C04B 35/44 based on aluminates
• CPC Class Codes: C04B 35/505 based on yttrium oxide
• CPC Class Codes: C04B 41/009 characterised by the material treated
• CPC Class Codes: C04B 41/53 involving the removal of at least part of the materials of the treated article, e.g. etching, drying of hardened concrete C04B41/0036 - C04B41/0054 take precedence
• CPC Class Codes: C04B 41/91 involving the removal of part of the materials of the treated articles, e.g. etching
• CPC Class Codes: H01J 37/32495 Means for protecting the vessel against plasma
• CPC Class Codes: Y10S 156/914 Differential etching apparatus including particular materials of construction
• CPC Class Codes: Y10S 156/916 Differential etching apparatus including chamber cleaning means or shield for preventing deposits
• CPC Class Codes: Y10T 428/131 Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
• CPC Class Codes: Y10T 428/1317 Multilayer [continuous layer]
• CPC Class Codes: Y10T 428/24355 Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]

Abstract

There is provided a treatment container which enables to prolong a period of time taken for reaction products, such as a halide generated through reaction with corrosive halide gas, to exfoliate and fall down as particles, and decreases the frequency of periodic maintenance operation, thereby implementing increase of operating time. The treatment container constituting a chamber or a bell jar has a portion of the inner surface to be exposed to corrosive halide gas plasma and is formed with a sintered body mainly composed of a compound of yttrium and aluminum with oxygen, and the portion has a roughened surface of a mean roughness Ra of 1.5 to 10 μm.

Claims

1. A treatment container for corrosive-gas and/or plasma etching or depositing comprising:

a container having a cylindrical body and an introduction tube extended upward from a shoulder portion on an upper side of the cylindrical body, the container comprising a sintered body including more than about 94% by weight of an yttria-alumina compound and zirconia in an amount of 0.05 to 5.0% by weight, wherein the zirconia takes the form of a phase dispersed in the sintered body, and the zirconia phase contains ceria as a stabilizing agent and an inner surface of the cylindrical body having a portion with a roughened surface having a mean roughness Ra of 1.5 to 10 μ

m, wherein an inner surface of the introduction tube is a smooth surface having a mean roughness Ra of less than 1.5 μ

m.

2. The container according to claim 1, wherein a main crystal phase in the sintered body contains yttrium-aluminum-garnet, alone or with combination to alumina or yttria.

3. The container according to claim 1, wherein the corrosive gas is a substance containing halogen.

4. The container according to claim 1, wherein a resin film is applied on a portion of an outer surface of the treatment container.

5. The container according to claim 4, wherein the resin film is a fluoro-resin film having a thickness of 0.2 to 2.0 mm.

6. A treatment container for corrosive-gas and/or plasma etching or depositing comprising:

a container having a cylindrical body and an introduction tube extended upward from a shoulder portion on an upper side of the cylindrical body, the container comprising a sintered body including more than about 95% by weight of an yttria-alumina compound and zirconia in an amount of 0.05 to 5.0% by weight, wherein the zirconia takes the form of a phase dispersed in the sintered body, and the zirconia phase contains ceria as a stabilizing agent and an inner surface of the cylindrical body having a portion with a roughened surface having a mean roughness Ra of 5 to 10 μ

m, wherein an inner surface of the introduction tube is a smooth surface having a mean roughness Ra of less than 1.5 μ

m.

7. The container according to claim 6, wherein a main crystal phase in the sintered body contains yttrium-aluminum-garnet, alone or with combination to alumina or yttria.

8. The container according to claim 6, wherein the corrosive gas is a substance containing halogen.

9. The container according to claim 6, wherein a resin film is applied on the outer surface of the treatment container.

10. The container according to claim 9, wherein the resin film is a fluoro-resin film having a thickness of 0.2 to 2.0 mm.