Photonic mems and structures

  • US 6,650,455 B2
  • Filed: 11/13/2001
  • Issued: 11/18/2003
  • Est. Priority Date: 05/05/1994
  • Status: Expired due to Fees
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First Claim
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1. An interferometric modulator comprising:

  • a structure associated with actuation of the modulator; and

    an interferometric cavity having walls, the structure being obscured by at least one of the walls of the interferometric cavity.

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