Double arm substrate transport unit

  • US 6,669,434 B2
  • Filed: 11/16/2001
  • Issued: 12/30/2003
  • Est. Priority Date: 11/17/2000
  • Status: Expired due to Fees
First Claim
Patent Images

1. A double arm substrate transport unit for transporting a work piece, comprising:

  • a base arm supported by a base so as to be freely rotatable;

    a first forearm supported by a tip part of said base arm so as to be freely rotatable;

    a first end effector on which a work piece is placeable, said first end effector being supported by a tip part of the first forearm so as to be freely rotatable;

    a second forearm supported by the tip part of the base arm so as to be freely rotatable, said second forearm being attached to said base arm above the first forearm; and

    a second end effector on which a work piece is placeable, said second end effector being supported by a tip part of the second forearm so as to be freely rotatable.

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