Methods and apparatus for power control

• US 6,671,660 B2
• Filed: 04/19/2002
• Issued: 12/30/2003
• Est. Priority Date: 04/19/2001
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: OnWafer Technologies, Inc. (KLA Corporation)
• Inventors: Freed, Mason L.
• Primary Examiner(s): Barlow, John
• Assistant Examiner(s): Walling, Meagan S.
• Application Number:
  US10/126,497
• Publication Number:
  US 20020161557A1
• Time in Patent Office: 620 Days
• Field of Search: 702/188, 455/343.1, 455/557, 455/574, 455/458, 455/466, 455/517, 455/522, 340/825.72, 340/825.69, 370/311, 370/335, 370/337, 370/338, 370/342
• US Class Current: 702/188
• CPC Class Codes: G08C 17/00 Arrangements for transmitting signals characterised by the use of a wireless electrical link
• CPC Class Codes: H04W 52/0229 where the received signal is a wanted signal
• CPC Class Codes: Y02D 30/70 in wireless communication networks

Abstract

Described are methods and apparatus that can provide increased power use efficiency for some applications of wireless telecommunications devices. An aspect of the present invention includes an apparatus for wireless communication. The apparatus includes a wireless communication system powered with a limited capacity power source. The apparatus is capable of controlling the power applied to the communication system so as to increase the efficiency for using the power. Another aspect of the present invention is a method of controlling power use for wireless telecommunications with a limited capacity power source.

Claims

1. An apparatus for acquiring data for process tools used for processing workpieces, the apparatus comprising:

a substrate;

at least one sensor supported by the substrate, the sensor being capable of providing information;

an information processor supported by the substrate, the information processor being connected with the sensor so as to receive information from the sensor;

an internal communicator supported by the substrate, the internal communicator being connected with the information processor so that the information processor can provide information to the internal communicator, the internal communicator being capable of wireless bi-directional communication;

a power source supported by the substrate, the power source being connected so as to provide power to the internal communicator, and

the information processor being capable of shutting off power to the internal communicator for an amount of time, the information processor being capable of turning on power to the internal communicator for an amount of time so that the apparatus can test for an incoming communication signal, and the information processor being capable of allowing power to the information processor in response to a signal.

2. The apparatus of claim 1 wherein the substrate comprises at least one of a semiconductor wafer and a substrate for a flatpanel display.

3. The apparatus of claim 1 wherein the power source comprises a battery.

4. The apparatus of claim 1 wherein the information processor comprises at least one of a computer, a microprocessor, and an application-specific integrated circuit.

5. The apparatus of claim 1 wherein the internal communicator is capable of transmitting and receiving information using at least one of infrared radiation, microwave radiation, and radio frequency radiation.

6. A method of deriving operating characteristics for a process tool used for processing workpieces, the method being performed with a sensor apparatus having, at least one sensor, an information processor, an independent power supply, and a wireless bi-directional communication system, the method comprising the steps of:

a) loading the sensor apparatus into the process tool;

b) using the information processor to turn on the power to the communication system for a first predetermined amount of time so that the communication system can test for an external communication signal;

c) if there is no signal, using the information processor to turn off the power to the communication system and waiting a second predetermined amount of time with the power to the communication system turned off and returning to step b;

d) if there is a signal, measuring the operating characteristics with the sensor, converting the measured operating characteristics into digital data, performing at least one step of

i. storing the digital data in the sensor apparatus,

ii. transmitting the digital data to a receiver, and

iii. storing the digital data in the sensor apparatus and transmitting the digital data to a receiver; and

e) using the information processor to turn off the power to the communication system and waiting the second predetermined amount of time with the power to the communication system turned off and returning to step b.

7. The method of claim 6 wherein the first predetermined amount of time is less than the second predetermined amount of time.

8. The method of claim 6 wherein the power used by sensor apparatus is less during the second predetermined amount of time than the power used by the sensor apparatus during the first predetermined amount of time.

9. An apparatus for wireless communication, the apparatus comprising:

an information processor;

an internal communicator, the internal communicator being capable of wirelessly transmitting and receiving information, the internal communicator being connected with the information processor so that the information processor can provide information to the internal communicator;

a power source, the power source being connected so as to provide power to the internal communicator, and

the information processor being capable of shutting off power to the internal communicator for an amount of time, the information processor being capable of turning on power to the internal communicator for an amount of time so that the apparatus can test for an incoming communication signal, and the information processor being capable of allowing power to the information processor in response to a signal.

10. The apparatus of claim 9 wherein the information processor comprises at least one of a computer, a microprocessor, and an application-specific integrated circuit.

11. The apparatus of claim 9 wherein the information processor comprises a microprocessor.

12. The apparatus of claim 9 wherein the information processor includes embedded executable instructions for shutting off power to the internal communicator for an amount of time, turning on power to the internal communicator for an amount of time, and allowing power to the information processor in response to a signal.

13. The apparatus of claim 9 wherein the internal communicator is capable of transmitting and receiving information using the infrared spectrum.

14. The apparatus of claim 9 wherein the internal communicator is capable of transmitting and receiving information using at least one of infrared radiation, microwave radiation, and radio frequency radiation.

15. The apparatus of claim 9 wherein the power source comprises a battery.

16. The apparatus of claim 9 wherein the internal communicator is capable of transmitting and receiving information using energy from the electromagnetic spectrum.

17. A method of operating a wireless communication device, the device having an information processor, an independent power supply, and a wireless bi-directional communication system, the method comprising the steps of:

a) using the information processor to turn on the power to the communication system for a first predetermined amount of time so that the communication system can test for an external communication signal;

b) if there is no signal, using the information processor to turn off the power to the communication system and waiting a second predetermined amount of time with the power to the communication system turned off and returning to step a;

c) if there is a signal, providing power to the communication system until a response to the signal is completed; and

d) using the information processor to turn off the power to the communication system and waiting the second predetermined amount of time with the power to the communication system turned off and returning to step a.

18. The method of claim 17 wherein the first predetermined amount of time is less than the second predetermined amount of time.

19. The method of claim 17 wherein the power used by the device is less during the second predetermined amount of time than the power used by the device during the first predetermined amount of time.