Interferometric modulation of radiation

  • US 6,674,562 B1
  • Filed: 04/08/1998
  • Issued: 01/06/2004
  • Est. Priority Date: 05/05/1994
  • Status: Expired due to Fees
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First Claim
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1. A method of making arrays of microelectromechanical structure on a production line comprisingforming electronic features on a surface of a glass or plastic substrate that is at least as large as 14″

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    16″

    , and micromachining electromechanical structures on the substrate.

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