Laser ablation nozzle assembly

• US 6,683,277 B1
• Filed: 12/20/2002
• Issued: 01/27/2004
• Est. Priority Date: 12/20/2002
• Status: Expired due to Term

• Current Assignee: Pictiva Displays International Limited (f/k/a Dolya Holdco 5 Limited) (Key Patent Innovations Limited)
• Original Assignee: Osram Opto Semiconductors Incorporated (Ams-Osram AG)
• Inventors: Millard, Ian, Pichler, Karl
• Primary Examiner(s): Heinrich, Samuel M.
• Application Number:
  US10/325,066
• Time in Patent Office: 403 Days
• Field of Search: 219/121.6, 219/121.63, 219/121.65, 219/121.67, 219/121.68, 219/121.7, 219/121.84
• US Class Current: 219/121.84
• CPC Class Codes: B23K 26/123 in an atmosphere of particular gases
• CPC Class Codes: B23K 26/142 for the removal of by-products
• CPC Class Codes: B23K 26/1436 for pressure control
• CPC Class Codes: B23K 26/1476 Features inside the nozzle for feeding the fluid stream through the nozzle

Abstract

A laser ablation system includes a first embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having a top end, and a window placed on the top end of the nozzle. The window includes one or more apertures and the laser beam is emitted through one of those apertures. Another laser ablation system includes a second embodiment of a nozzle assembly where a laser beam is emitted through the nozzle assembly to remove materials on a target. The nozzle assembly includes a nozzle having one or more channels at a top end of the nozzle. The nozzle assembly also includes a window that is placed on the one or more channels. A gas flows through the one or more channels and that gas flow reduces debris deposition on the window. Yet another laser ablation system includes a third embodiment of a nozzle assembly that includes a nozzle that has a central channel aligned longitudinally through which said laser beam travels from a top end of said nozzle to a bottom end of said nozzle. In this embodiment, the central channel of the nozzle is threaded.

Claims

1. Within a laser ablation system, a nozzle assembly and a laser beam that is emitted through said nozzle assembly to remove materials on a target, said nozzle assembly comprising:

a nozzle having a top end; and

a window on said top end of said nozzle, said window includes at least one aperture,

wherein said laser beam is emitted through a particular one of said at least one aperture.

2. The nozzle assembly of claim 1 wherein a diameter of said particular aperture is greater than or equal to a diameter of said laser beam.

3. The nozzle assembly of claim 1 wherein a diameter of said particular aperture is less than a diameter of said laser beam.

4. The nozzle assembly of claim 1 wherein said window is transparent.

5. The nozzle assembly of claim 1 wherein said window is opaque.

6. The nozzle assembly of claim 1 wherein a shape of said particular aperture is any one of a circle, a square, or a rectangle.