Apparatus for correlating an optical image and a SEM image and method of use thereof
First Claim
Patent Images
1. An instrument system comprising:
- a camera for acquiring an optical image of an object, the optical image defining a first coordinate system;
means for positioning the object in a second coordinate system;
means for adjusting the position of the object in the second coordinate system; and
a computer operative for storing the optical image, for defining a relationship between the first and second coordinate systems and for at least one of;
(i) causing the adjusting means to move the object in response to selection of a point in the first coordinate system corresponding to a point on the optical image so that the point on the object corresponding to the point on the optical image is located at a point in the second coordinate system related to the selected point in the first coordinate system; and
(ii) causing an indicia superimposed on the optical image to move to a point in the first coordinate system corresponding to the point in the second coordinate system in response to moving the object in the second coordinate system.
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Abstract
An instrument system is controlled to acquire an optical image of an object, with the optical image defining a first coordinate system. The object is positioned in a second coordinate system and a point in the optical image is selected. The object is repositioned so that a point on the object corresponding to the selected point in the optical image is positioned at a predetermined point in the second coordinate system. Alternatively, movement of the object causes an indicia on the optical image to move to a point thereon corresponding to the point on the object that is positioned at the predetermined point in the second coordinate system.
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Citations
18 Claims
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1. An instrument system comprising:
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a camera for acquiring an optical image of an object, the optical image defining a first coordinate system;
means for positioning the object in a second coordinate system;
means for adjusting the position of the object in the second coordinate system; and
a computer operative for storing the optical image, for defining a relationship between the first and second coordinate systems and for at least one of;
(i) causing the adjusting means to move the object in response to selection of a point in the first coordinate system corresponding to a point on the optical image so that the point on the object corresponding to the point on the optical image is located at a point in the second coordinate system related to the selected point in the first coordinate system; and
(ii) causing an indicia superimposed on the optical image to move to a point in the first coordinate system corresponding to the point in the second coordinate system in response to moving the object in the second coordinate system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A computer-assisted method of controlling an instrument system comprising the steps of:
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acquiring an optical image of an object, the optical image defining a first coordinate system;
positioning the object in a second coordinate system having a predetermined relation to the first coordinate system; and
at least one of;
in response to selecting a point in the first coordinate system, repositioning the object whereupon a point on the object corresponding to the selected point is located at a point in the second coordinate system related to the selected point in the first coordinate system; and
in response to repositioning the object, moving an indicia superimposed on the optical image to a point thereon corresponding to a point on the object that is located at the predetermined point in the second coordinate system. - View Dependent Claims (11, 12, 13, 14, 15)
correcting for optical distortion between points in the optical image and corresponding points of the object;
correcting for a scale difference in the distance between two points in the optical image and two corresponding points of the object; and
correcting for an offset difference between a point in the optical image and a corresponding point of the object.
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12. The method as set forth in claim 11, wherein the step of correcting for optical distortion includes the steps of:
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acquiring an image of a target object having a plurality of concentric circles of known spacing;
determining a distance between each pair of concentric circles in the optical image;
determining a relationship between the distance between each pair of concentric circles in the optical image and the actual distance between each pair of concentric circles of the target object; and
positioning the object as a function of the thus determined relationship.
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13. The method as set forth in claim 11, wherein the step of correcting for the scale difference includes the steps of:
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selecting a first reference point in a first optical image;
recording a first location in the first optical image where the first reference point is located;
recording a first position of the adjusting means related to the first location of the first reference point;
adjusting the position of the object;
selecting a second reference point in a second optical image;
recording a second location in the second optical image where the second reference point is located;
recording a second position of the adjusting means related to the second location of the second reference point;
determining a ratio between the first and second positions and the first and second locations; and
positioning the object as a function of the thus determined ratio.
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14. The method as set forth in claim 11, wherein the step of correcting for the scale difference includes the steps of:
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acquiring an optical image and a first virtual image of an object;
recording a first position of the adjusting means related to a location of a first feature in the first virtual image;
recording a first location in the optical image where the first feature is located;
moving the object;
acquiring a second virtual image of the object;
recording a second position of the adjusting means related to a location of a second feature in the second virtual image;
recording a second location in the optical image where the second feature is located;
determining a ratio between the first and second locations and the first and second positions; and
causing the adjusting means to position the object as a function of the thus determined ratio.
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15. The method as set forth in claim 11, wherein the step of correcting for the offset difference includes the steps of:
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detecting the response of the object to an electron beam;
constructing a scanning electron microscope (virtual) image of the object from the detected response;
selecting a reference point in the virtual image;
determining a position in the virtual image corresponding to the selected reference point therein;
selecting a reference point in the optical image corresponding to the reference point selected in the virtual image;
determining a position in the optical image corresponding to the selected reference point therein;
determining a difference between the positions in the virtual and optical images; and
positioning the object as a function of the thus determined difference.
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16. An instrument apparatus comprising:
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means for acquiring an optical image of an object, the optical image defining a first coordinate system;
means for positioning the object in a second coordinate system related to the first coordinate system; and
at least one of;
(i) means responsive to the selection of a point in the optical image for causing the positioning means to position the object whereupon a point on the object corresponding to the selected point in the optical image is located at a predetermined point in the second coordinate system; and
(ii) means responsive to the positioning means moving the object in the second coordinate system whereupon an indicia on the optical image moves to a point thereon corresponding to the point on the object that is located at the predetermined point in the second coordinate system. - View Dependent Claims (17, 18)
means responsive to interaction between the object and an electron beam at the second location for outputting an indication thereof; and
means responsive to the output indication for constructing the virtual image of the object.
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Specification