System using hot and cold fluids to heat and cool plate

  • US 6,685,467 B1
  • Filed: 11/10/2000
  • Issued: 02/03/2004
  • Est. Priority Date: 10/24/2000
  • Status: Expired due to Fees
First Claim
Patent Images

1. A baking system, comprising:

  • a baking plate within which are formed passages through which fluids maybe circulated;

    a hot fluid supply and a cold fluid supply;

    a flow control system;

    a controller; and

    a measuring system that measures chemical and/or physical changes in a resist coating on a substrate on the baking plate;

    wherein the controller, in response to data provided by the measuring system, directs the flow control system to supply the passages with fluid from the hot fluid supply and/or fluid from the cold fluid supply, depending on whether the baking plate needs to be heated or cooled.

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