Defect detection in semiconductor devices
First Claim
1. A method for testing an integrated circuit, wherein the circuit has circuitry in a circuit side opposite a back side, the method comprising:
- removing substrate from the back side and exposing a target region;
applying an energy source at the target region, thereby generating a plurality response signals from the integrated circuit;
detecting the response signals from in the integrated circuit via at least one detector;
correlating the detected response signals with a reference signal to determine the amount of deviation from the reference signal; and
identifying the type of defect in the circuit as a function of the deviation between the detected response signals and the reference signal and as function of the energy source used to generate the response signal.
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Abstract
According to an example embodiment of the present invention, a defect detection approach involves detecting the existence of defects in an integrated circuit as a function of at least one applied energy source. In response to energy that is applied to the integrated circuit, response signals are detected. A parameter including information such as amplitude, frequency, phase, or a spectrum is developed for a reference integrated circuit device and then compared to the detected response signal. The deviation in the response and reference signals, and the type of energy source used, are correlated to a particular defect in the device.
21 Citations
16 Claims
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1. A method for testing an integrated circuit, wherein the circuit has circuitry in a circuit side opposite a back side, the method comprising:
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removing substrate from the back side and exposing a target region;
applying an energy source at the target region, thereby generating a plurality response signals from the integrated circuit;
detecting the response signals from in the integrated circuit via at least one detector;
correlating the detected response signals with a reference signal to determine the amount of deviation from the reference signal; and
identifying the type of defect in the circuit as a function of the deviation between the detected response signals and the reference signal and as function of the energy source used to generate the response signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A system for testing an integrated circuit having circuitry in a circuit side opposite a back side, the system comprising:
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means for removing substrate from the back side;
an energy source adapted to generate response signals that is emitted from the integrated circuit;
means for detecting the response signals emitted from the integrated circuit;
means for correlating the detected response signals with a reference signal to determine the amount of deviation from the reference signal that has occurred; and
means for identifying the type of defect in the circuit as a function of the deviation and the energy source used to generate the response signals.
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12. A system for testing an integrated circuit having circuitry in a circuit side opposite a back side, the system comprising:
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a substrate removal device;
an energy source configured and arranged to excite circuitry in the integrated circuit;
a plurality of energy source detectors; and
a computer arrangement configured to correlate detected response signals with a reference signal to determine the amount of deviation between signals, and to identify the type of defect in the circuit as a function of the signal deviations and as function of the energy source used to generate the response signal. - View Dependent Claims (13, 14, 15, 16)
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Specification