Batch fabricated semiconductor thin-film pressure sensor and method of making same

• US 6,700,174 B1
• Filed: 09/25/1997
• Issued: 03/02/2004
• Est. Priority Date: 09/25/1997
• Status: Expired due to Term

• Current Assignee: Cisco Technology, Inc. (Cisco Systems, Inc.)
• Original Assignee: Integrated Micromachines, Inc. (Advantest Corporation)
• Inventors: Tang, Weilong, Miu, Denny K.
• Primary Examiner(s): LEE, HSIEN MING
• Assistant Examiner(s): Dutton, Brian
• Application Number:
  US08/937,859
• Time in Patent Office: 2,350 Days
• Field of Search: 338/4, 737/27, 257/417
• US Class Current: 257/419
• CPC Class Codes: G01L 9/0051 using variations in ohmic resistance
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/0075 using a ceramic diaphragm, e.g. alumina, fused quartz, glass
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

A pressure sensor having a flexible membrane which is moved by an external force, such as pressure from an air flow. The flexible membrane extends over a semiconductor frame having an opening, such that a portion of the flexible membrane extends over the semiconductor frame, and a portion of the flexible membrane extends over the opening. An inherent tensile stress is present in the membrane. One or more strain gage resistors are formed on the portion of the membrane which extends over the opening of the semiconductor frame. The membrane deforms in response to an externally applied pressure. As the membrane deforms, the strain gage resistors elongate, thereby increasing the resistances of these resistors. This change in resistance is measured and used to determine the magnitude of the external pressure. In one embodiment, a Wheatstone bridge circuit is used to translate the change in resistance of the strain gage resistors into a differential voltage.

Claims

1. A pressure sensor comprising:

a semiconductor frame having an opening;

a flexible membrane which extends over the semiconductor frame and over the opening of the semiconductor frame; and

a first strain gage resistor formed over a portion of the membrane which extends over the opening of the semiconductor frame.

2. The pressure sensor of claim 1, wherein the semiconductor frame comprises monocrystalline silicon.

3. The pressure sensor of claim 1, wherein the membrane comprises silicon nitride.

4. The pressure sensor of claim 1, wherein the first strain gage resistor comprises nickel-chrome.

5. The pressure sensor of claim 1, further comprising a second strain gage resistor formed over a portion of the membrane which extends over the opening of the semiconductor frame.

6. The pressure sensor of claim 5, wherein the first strain gage resistor and the second strain gage resistor are symmetrical.

7. The pressure sensor of claim 5, wherein the first strain gage resistor and the second strain gage resistor each have a serpentine shape.

8. The pressure sensor of claim 5, wherein the first strain gage resistor and the second strain gage resistor have the same resistance values.

9. The pressure sensor of claim 5, further comprising:

a third resistor formed over a portion of the membrane which extends over the semiconductor frame;

a fourth resistor formed over a portion of the membrane which extends over the semiconductor frame; and

a plurality of electrically conductive traces formed over the membrane, wherein the traces connect the first strain gage resistor, the second strain gage resistor, the third resistor and the fourth resistor in a Wheatstone bridge circuit.

10. The pressure sensor of claim 9, wherein the third and fourth resistors are strain gage resistors.

11. The pressure sensor of claim 1, further comprising a first stopper coupled to the semiconductor frame, wherein the first stopper extends over the membrane and limits deflection of the membrane along a first direction.

12. The pressure sensor of claim 11, further comprising a second stopper coupled to the semiconductor frame, wherein the second stopper extends over the membrane and limits deflection of the membrane along a second direction, opposite the first direction.