Controlling micro-electro-mechanical cavities

  • US 6,710,908 B2
  • Filed: 02/13/2002
  • Issued: 03/23/2004
  • Est. Priority Date: 05/05/1994
  • Status: Expired due to Fees
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First Claim
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1. Apparatus comprisingtwo walls defining a cavity having a cavity dimension, the cavity being configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, wherein the cavity dimension determines an optical response to light incident on the cavity, the optical response being based on interference, and at least two electrical structures configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.

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