Controlling micro-electro-mechanical cavities
First Claim
1. Apparatus comprisingtwo walls defining a cavity having a cavity dimension, the cavity being configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, wherein the cavity dimension determines an optical response to light incident on the cavity, the optical response being based on interference, and at least two electrical structures configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
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Accused Products
Abstract
Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
956 Citations
29 Claims
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1. Apparatus comprising
two walls defining a cavity having a cavity dimension, the cavity being configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, wherein the cavity dimension determines an optical response to light incident on the cavity, the optical response being based on interference, and at least two electrical structures configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.
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18. Apparatus comprising
an array of interferometric modulators, actuation electrodes associated with the respective interferometric modulators, and a pattern of conductors connecting the actuation electrodes in groups.
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24. A method comprising
energizing one electrical structure to apply an electrostatic force in the vicinity of a cavity; - and
independently energizing another electrical structure to apply an electrostatic force in the vicinity of the cavity. - View Dependent Claims (25, 26, 27, 28, 29)
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Specification