Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus
First Claim
1. An ink-jet recording head comprising:
- a passage-forming substrate having a pressure generating chamber formed thereon, which communicates with a nozzle orifice;
a piezoelectric element formed of a thin film and by a lithography method in a region corresponding to said pressure generating chamber via a vibration plate constituting a portion of said pressure generating chamber;
a passage-forming layer disposed between said passage-forming substrate and said vibration plate, and having side surfaces in the width direction such that a space portion is defined by said side surfaces in the width direction and the surface of said vibration plate; and
wherein said space portion is formed by etching a layer disposed between said passage-forming substrate and said vibration plate, wherein the width of said layer is defined by said side surfaces in the width direction of said passage-forming layer and said layer having option of etching to the passage-forming layer, and at least the width of said pressure generating chamber is equal to the width of the space portion or less, wherein at least a portion of the side surface of said pressure generating chamber is constituted of a slanted surface slanting from said space portion to the inside of the pressure generating chamber.
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Accused Products
Abstract
Disclosed is an ink-jet recording head improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof, capable of arraying pressure generating chambers in high density, and reducing cross talk between the pressure generating chambers. Moreover, disclosed are a manufacturing method of the same and an ink-jet recording apparatus having the ink-jet recording head built therein.
The ink-jet recording head comprises: a passage-forming substrate 10 having a pressure generating chamber 11 formed therein, which communicates with a nozzle orifice; and a piezoelectric element 300 formed of a thin film and by a lithography method in a region corresponding to the pressure generating chamber 11 via a vibration plate constituting a portion of the pressure generating chamber 11. The ink-jet recording head is characterized in that a space portion 41 communicating with the pressure generating chamber 11 and having at least one surface constituted of the vibration plate is provided in the region between the passage-forming substrate 10 and the vibrating plate, the region being opposite the pressure generating chamber 11, and at least a width of the pressure generating chamber 11 close to the space portion 41, is set to be equal to a width of the space portion 41 or less, thus relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300 is improved.
8 Citations
19 Claims
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1. An ink-jet recording head comprising:
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a passage-forming substrate having a pressure generating chamber formed thereon, which communicates with a nozzle orifice;
a piezoelectric element formed of a thin film and by a lithography method in a region corresponding to said pressure generating chamber via a vibration plate constituting a portion of said pressure generating chamber;
a passage-forming layer disposed between said passage-forming substrate and said vibration plate, and having side surfaces in the width direction such that a space portion is defined by said side surfaces in the width direction and the surface of said vibration plate; and
wherein said space portion is formed by etching a layer disposed between said passage-forming substrate and said vibration plate, wherein the width of said layer is defined by said side surfaces in the width direction of said passage-forming layer and said layer having option of etching to the passage-forming layer, and at least the width of said pressure generating chamber is equal to the width of the space portion or less, wherein at least a portion of the side surface of said pressure generating chamber is constituted of a slanted surface slanting from said space portion to the inside of the pressure generating chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 18)
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13. An ink-jet recording head comprising:
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a passage-forming substrate having a pressure generating chamber formed thereon, which communicates with a nozzle orifice;
a piezoelectric element formed of a thin film and by a lithography method in a region corresponding to said pressure generating chamber via a vibration plate constituting a portion of said pressure generating chamber;
a passage-forming layer disposed between said passage-forming substrate and said vibration plate, and having side surfaces in the width direction such that a space portion is defined by said side surfaces in the width direction and the surface of said vibration plate; and
wherein said space portion is formed by etching a layer disposed between said passage-forming substrate and said vibration plate, wherein the width of said layer is defined by said side surfaces in the width direction of said passage-forming layer and said layer having option of etching to the passage-forming layer, and at least the width of said pressure generating chamber is equal to the width of the space portion or less, wherein said vibration plate has a step difference portion extending to a direction crossing with the plane direction in a region corresponding to each pressure generating chamber, and said space portion is defined by said step difference portion. - View Dependent Claims (14, 15, 16, 17)
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19. The ink-jet recording head comprising:
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a passage-forming substrate having a pressure generating chamber formed thereon, which communicates with a nozzle orifice;
a piezoelectric element formed of a thin film and by a lithography method in a region corresponding to said pressure generating chamber via a vibration plate constituting a portion of said pressure generating chamber;
a passage-forming layer disposed between said passage-forming substrate and said vibration plate, and having side surfaces in the width direction such that a space portion is defined by said side surfaces in the width direction and the surface of said vibration plate; and
wherein said space portion is formed by etching a layer disposed between said passage-forming substrate and said vibration plate, wherein the width of said layer is defined by said side surfaces in the width direction of said passage-forming layer and said layer having option of etching to the passage-forming layer, and at least the width of said pressure generating chamber is equal to the width of the space portion or less, wherein the width of said space portion is wider than the width of the piezoelectric active portion constituting said piezoelectric element, and the relation between width WA of said pressure generating chamber and width WB of said piezoelectric active portion satisfies WA<
WB.
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Specification