Spatially modulated reflector for an optoelectronic device
First Claim
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1. A resonant reflector for an optoelectronic device tuned to a wavelength, the resonant reflector comprising:
- a first material layer having a thickness of an odd multiple of a quarter of the wavelength and also having a first refractive index, the first material layer having one or more patterned regions that extend down into the first material layer thus reducing the thickness of the first material layer in the one or more patterned regions, selected patterned regions being at least partially filled with a second material having a second refractive index, the first refractive index being less than the second refractive index, the second material having a thickness of an odd multiple of a quarter the wavelength; and
a third layer positioned immediately adjacent the first material layer, the third layer having a third refractive index that is greater than the first refractive index.
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Abstract
Improved resonant reflectors are provided for increased mode control of optoelectronic devices. Some of the resonant reflectors provide improved mode control while not requiring significant additional processing steps, making them ideal for commercial applications. Other resonant reflectors reduce or eliminate abrupt changes in the reflectively of the resonant reflector across an optical cavity of an optoelectronic device, allowing them to reduce or eliminate undesirable diffraction effects that are common in many resonant reflectors.
90 Citations
25 Claims
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1. A resonant reflector for an optoelectronic device tuned to a wavelength, the resonant reflector comprising:
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a first material layer having a thickness of an odd multiple of a quarter of the wavelength and also having a first refractive index, the first material layer having one or more patterned regions that extend down into the first material layer thus reducing the thickness of the first material layer in the one or more patterned regions, selected patterned regions being at least partially filled with a second material having a second refractive index, the first refractive index being less than the second refractive index, the second material having a thickness of an odd multiple of a quarter the wavelength; and
a third layer positioned immediately adjacent the first material layer, the third layer having a third refractive index that is greater than the first refractive index.
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2. A resonant reflector for an optoelectronic device tuned to a wavelength, the resonant reflector comprising:
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a first material layer having a thickness of an odd multiple of a quarter of the wavelength and also having a first refractive index, the first material layer having one or more patterned regions that extend all the way through the first material layer, selected patterned regions being at least partially filled with a second material having a second refractive index, the first refractive index being less than the second refractive index; and
a third layer positioned immediately adjacent the first material layer, the third layer having a third refractive index that is greater than the first refractive index. - View Dependent Claims (3, 4, 5, 6, 7)
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8. A resonant reflector for an optoelectronic device, the resonant reflector comprising:
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a first mirror region having a top mirror layer, the top mirror layer having one or more patterned regions that extend down into the top mirror layer but not all the way through, and one or more non-patterned regions; and
a second mirror region formed on selected non-patterned regions of the top mirror layer. - View Dependent Claims (9, 10, 11)
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12. A resonant reflector for an optoelectronic device, the resonant reflector comprising:
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a top mirror with a top mirror layer, the top mirror layer etched with a pattern down but not through the top mirror layer resulting in one or more patterned regions and one or more non-patterned regions, wherein the one or more patterned regions reduce the reflectivity of the resonant reflector in those regions;
a cap mirror situated above selected non-patterned regions of the top mirror layer. - View Dependent Claims (13, 14)
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15. A resonant reflector for an optoelectronic device that has an optical cavity with an optical axis, the resonant reflector comprising:
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a resonant reflector layer extending across at least part of the optical cavity of the optoelectronic device, the resonant reflector layer having a refractive index that does not abruptly change laterally across the optical cavity;
the refractive index of the resonant reflector layer including contributions from a first material having a first refractive index and a second material having a second refractive index, at least one of the first material and the second material being a polymer. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22)
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23. A resonant reflector for an optoelectronic device that has an optical cavity with an optical axis, the resonant reflector comprising:
a resonant reflector layer defined by two substantially planar opposing surfaces extending across at least part of the optical cavity of the optoelectronic device, the resonant reflector layer having a first region with a first refractive index and a second region with a second refractive index, the first region and the second region co-extending along an interface, at least part of the interface being not parallel to the optical axis. - View Dependent Claims (24)
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25. A resonant reflector for an optoelectronic device tuned to a wavelength, the resonant reflector comprising:
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a first material layer having a thickness of an odd multiple of a quarter of the wavelength and also having a first refractive index, the first material layer having one or more patterned regions that extend down into the first material layer thus reducing the thickness of the first material layer in the one or more patterned regions, selected patterned regions being at least partially filled with a second material having a second refractive index, the first refractive index being less than the second refractive index; and
a third layer positioned immediately adjacent the first material layer, the third layer having a third refractive index that is greater than the first refractive index.
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Specification