Device having a light-absorbing mask and a method for fabricating same

• US 6,741,377 B2
• Filed: 07/02/2002
• Issued: 05/25/2004
• Est. Priority Date: 07/02/2002
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Iridigm Display Corporation (Qualcomm, Inc.)
• Inventors: Miles, Mark W.
• Primary Examiner(s): Ben, Loha
• Application Number:
  US10/190,400
• Publication Number:
  US 20040027636A1
• Time in Patent Office: 693 Days
• Field of Search: 359/243, 359/247, 359/254, 359/230, 359/290, 359/291, 359/292, 359/293, 359/586, 359/587, 359/589, 385/14, 385/18, 385/24, 385/50, 430/5, 430/311, 430/322, 430/323, 216/12, 216/41
• US Class Current: 359/243
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: G02B 26/02 for controlling the intensity of light G02B26/004 takes precedence
• CPC Class Codes: G02B 27/0018 with means for preventing ghost images anti-reflection coatings G02B1/11
• CPC Class Codes: G02B 5/003 Light absorbing elements
• CPC Class Codes: G02B 5/288 comprising at least one thin film resonant cavity, e.g. in bandpass filters
• CPC Class Codes: G03F 7/0007 Filters, e.g. additive colour filters; Components for display devices

Abstract

The invention provides a method for fabricating an optical device comprising at least one optical component formed on a transparent substrate. The method comprises determining an area of the substrate that is to be light-absorbing; and fabricating a light-absorbing mask on the determined area prior to fabricating the at least one optical component. The invention also provides an optical device comprising a substrate; and first and second optical components formed on the substrate, wherein the first optical component has two modes, each mode producing a different optical response to light incident thereupon, and wherein the second optical component absorbs light and is formed on the substrate before the first optical component is formed.

Claims

1. A method for fabricating an optical device comprising at least one active optical component formed on a transparent substrate, the method comprising:

determining an area of the substrate that is to be light-absorbing wherein the determined area is laterally offset from the at least one active optical component; and

fabricating a light-absorbing mask on the determined area prior to fabricating the at least one active optical component.

2. The method of claim 1, wherein the active optical component comprises a pixel, the light-absorbing area being an area bordering the pixel.

3. The method of claim 2, wherein the fabricating comprises depositing a first light-reflecting layer on the substrate, depositing a non-light-absorbing dielectric layer on the first light-reflecting layer;

and depositing a second light-reflecting layer on non-light absorbing dielectric layer.

4. The method of claim 3, wherein the first and second light-reflecting layers comprise metallic materials are metallic.

5. The method of claim 4, wherein the non-light absorbing dielectric layer comprises an oxide layer.

6. The method of claim 2, wherein the pixel is defined by an interferometric modulator.

7. The method of claim 1, wherein the light-absorbing mask comprises an organic material.

8. The method of claim 7, wherein the organic material comprises a photo- definable black resin.

9. An optical device comprising:

a substrate; and

first and second optical components formed on the substrate, wherein the first optical component has two modes, each mode producing a different optical response to light incident thereupon, and wherein the second optical component absorbs light, is laterally offset from the first optical component and is formed on the substrate before the first optical component is formed.

10. The device of claim 9, wherein the first optical component comprises an interferometric modulator.

11. The device of claim 10, wherein the second optical component is formed around the interferometric modulator.

12. The device of claim 9, wherein the second optical component comprises an organic material.

13. The device of claim 9, wherein the second optical component comprises a film stack.

14. The device of claim 13, wherein the film stack comprises a non-light-absorbing dielectric material sandwiched between two layers of chrome.

15. A method for microfabricating an optical device, the method comprising:

forming a static optical component on a substrate, wherein the static optical component absorbs light; and

forming a dynamic optical component adjacent to the static optical component, wherein the dynamic optical component includes a driven and an undriven state, each state having a characteristic optical response to incident light, and wherein the dynamic optical component is laterally offset from the static optical component.

16. The method of claim 15, wherein the dynamic optical component comprises an interferometric modulator.

17. The method of claim 15, wherein the static optical component comprises a film stack.

18. The method of claim 17, wherein the film stack comprises a non-light-absorbing dielectric material sandwiched between two light-reflecting materials.

19. The method of claim 15, wherein the static optical component forms a mechanical support for portions of the dynamic optical component.

20. An optical device comprising:

a substrate;

a static optical component on the substrate, wherein the static optical component absorbs light; and

a dynamic optical component adjacent to the static optical component, wherein the dynamic optical component includes a driven and an undriven state, each state having a characteristic optical response to incident light, and wherein the dynamic optical component is laterally offset from the static optical component.

21. The device of claim 20, wherein the dynamic optical component comprises an interferometric modulator.

22. The device of claim 20, wherein the state optical component comprises a film stack.

23. The device of claim 22, wherein the film stack comprises a non-light absorbing dielectric material sandwiched between two light reflecting materials.

24. The device of claim 20, wherein the static optical component forms a mechanical support for portions of the dynamic optical component.