Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap
First Claim
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1. A MEMS structure comprising:
- a substrate;
at least one conductive element that is in mechanical communication with the substrate and that extends therefrom;
a movable MEMS element having a portion that is free from the substrate and positioned such that a gap separating the movable MEMS element from the at least one conductive element defines a variable-sized dimension extending substantially parallel to the substrate;
at least one electrical trace having a first terminal end in electrical communication with the at least one conductive element and a second terminal end in electrical communication with a peripheral region; and
a cap attached to the substrate inside the peripheral region having upper and side walls that encapsulate the at least one conductive element and the movable MEMS element.
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Abstract
A MEMS structure is provided having a cap that encapsulates and protects the fragile components of the device, while having an electrical trace embedded in a nonconductive substrate. The electrical trace includes a first terminal end that is exposed to the peripheral region of the device, and a second end that is connected to the MEMS structure to facilitate operation of the device.
118 Citations
80 Claims
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1. A MEMS structure comprising:
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a substrate;
at least one conductive element that is in mechanical communication with the substrate and that extends therefrom;
a movable MEMS element having a portion that is free from the substrate and positioned such that a gap separating the movable MEMS element from the at least one conductive element defines a variable-sized dimension extending substantially parallel to the substrate;
at least one electrical trace having a first terminal end in electrical communication with the at least one conductive element and a second terminal end in electrical communication with a peripheral region; and
a cap attached to the substrate inside the peripheral region having upper and side walls that encapsulate the at least one conductive element and the movable MEMS element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A MEMS structure disposed within a peripheral region comprising:
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a substrate;
a movable MEMS element having outer ends permanently connected to the substrate, and a middle portion connected between the outer ends and free from the substrate;
a stationary conductive MEMS element in mechanical communication with the substrate and disposed adjacent the movable MEMS element, wherein a gap is disposed between the middle portion and the stationary conductive MEMS element, and wherein the gap defines a variable-sized dimension extending substantially parallel to the substrate; and
a cap attached to the substrate having upper and side walls that encapsulate the stationary conductive MEMS element and the movable MEMS element. - View Dependent Claims (23, 24, 25, 26, 27)
at least one electrical trace having a first terminal end in electrical communication with the stationary conductive MEMS element and a second terminal end in electrical communication with the peripheral region.
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24. The MEMS structure as recited in claim 23, further comprising:
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a second stationary MEMS element in mechanical communication with the substrate and disposed adjacent the movable MEMS element; and
a second electrical trace having a first terminal end in electrical communication with the second stationary MEMS element and a second terminal end in electrical communication with the peripheral region.
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25. The MEMS structure as recited in claim 24, wherein the stationary MEMS elements are electrically isolated from each other.
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26. The MEMS structure as recited in claim 22, wherein the movable MEMS element further comprises at least two conductive elements.
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27. The MEMS structure as recited in claim 26, wherein the at least two conductive elements are electrically isolated from each other.
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28. A MEMS structure surrounded by a peripheral region, the MEMS structure comprising:
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a substrate;
at least one stationary conductive element that is in mechanical communication with the substrate;
a movable MEMS element disposed adjacent the at least one stationary conductive element, and having outer ends permanently connected to the substrate, and a middle portion connected between the outer ends and free from the substrate; and
at least one electrical trace having a first terminal end in electrical communication with the at least one stationary conductive element and a second terminal end in electrical communication with the peripheral region, wherein the at least one electrical trace is disposed within an electrically insulating interface between the at least one conductive MEMS element and the substrate. - View Dependent Claims (29, 30)
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31. A MEMS structure surrounded by a peripheral region, the MEMS structure comprising:
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a substrate extending along a lateral direction;
first and second stationary conductive elements in mechanical communication with the substrate;
a movable MEMS element disposed laterally adjacent the stationary conductive elements, and having outer ends permanently connected to the substrate, and a middle portion connected between the outer ends and free from the substrate; and
first and second electrical traces having first terminal ends in electrical communication with the first and second stationary elements, respectively, and having second terminal ends in electrical communication with the peripheral region, wherein each trace is disposed within an electrically insulating interface between the substrate and the stationary conductive elements. - View Dependent Claims (32, 33, 34, 35, 36)
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37. A MEMS structure comprising:
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a substrate;
at least one conductive element that is in mechanical communication with the substrate and that extends therefrom;
a movable MEMS element having a portion that is free from the substrate and positioned such that a gap separates the movable MEMS element from the at least one conductive element;
at least one electrical trace having a first terminal end in electrical communication with the at least one conductive element and a second terminal end in electrical communication with a peripheral region; and
a cap attached to the substrate inside the peripheral region having upper and side walls that encapsulate the at least one conductive element and the movable MEMS element, wherein the at least one electrical trace is disposed within an electrically insulating interface between the at least one conductive MEMS element and the substrate. - View Dependent Claims (38, 39, 40, 41)
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42. A MEMS structure comprising:
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a substrate;
at least one stationary conductive element that is in mechanical communication with the substrate and that extends therefrom;
a movable MEMS element having outer ends permanently connected to the substrate and a middle portion connected between the outer ends that is free from the substrate and positioned such that a gap separates the movable MEMS element from the at least one conductive element, wherein the gap defines a variable-sized dimension extending substantially parallel to the substrate;
at least one electrical trace having a first terminal end in electrical communication with the at least one stationary conductive element and a second terminal end in electrical communication with a peripheral region; and
a cap attached to the substrate inside the peripheral region having upper and side walls that encapsulate the at least one stationary conductive element and the movable MEMS element. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62)
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63. A MEMS structure disposed within a peripheral region comprising:
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a substrate; a stationary element extending from the substrate;
a movable MEMS element having a portion that is free from the substrate and positioned adjacent the stationary element such that a variable-sized gap separating the movable MEMS element from the stationary element defines a dimension having a size that changes in response to movement of the movable MEMS element, wherein the dimension extends substantially parallel to the substrate; and
a cap attached to the substrate having upper and side walls that encapsulate the movable MEMS element and the stationary element. - View Dependent Claims (64, 65, 66, 67, 68, 69)
a second stationary element extending from the substrate and disposed adjacent the movable MEMS element; - and
a second electrical trace having a first terminal end in electrical communication with the second stationary element and a second terminal end in electrical communication with the peripheral region.
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66. The MEMS structure as recited in claim 65, wherein the stationary elements are electrically isolated from each other.
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67. The MEMS structure as recited in claim 63, wherein the stationary element is conductive.
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68. The MEMS structure as recited in claim 63, wherein the movable MEMS element further comprises at least two conductive elements.
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69. The MEMS structure as recited in claim 68, wherein the at least two conductive elements are electrically isolated from each other.
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70. A MEMS structure surrounded by a peripheral region, the MEMS structure comprising:
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a substrate;
at least one stationary element that is in mechanical communication with the substrate;
a movable MEMS element having a portion that is free from the substrate and positioned adjacent the stationary element such that a variable-sized gap extends substantially parallel to the substrate and separates the movable MEMS element from the stationary element; and
at least one electrical trace having a first terminal end in electrical communication with the at least one stationary element and a second terminal end in electrical communication with the peripheral region, wherein the trace is disposed within an electrically insulating layer between the stationary element and the substrate. - View Dependent Claims (71, 72, 73)
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74. A MEMS structure surrounded by a peripheral region, the MEMS structure comprising:
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a substrate;
first and second stationary elements in mechanical communication with the substrate;
a movable MEMS element having a portion that is free from the substrate and positioned adjacent the stationary elements such that first and second gaps separating the movable MEMS element from the first and second stationary elements, respectively, define variable-sized dimensions that extend substantially parallel to the substrate; and
first and second electrical traces having first terminal ends in electrical communication with the first and second stationary elements, respectively, and having second terminal ends in electrical communication with the peripheral region. - View Dependent Claims (75, 76, 77, 78, 79, 80)
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Specification