Parallel kinematic micromanipulator

• US 6,769,194 B2
• Filed: 04/14/2003
• Issued: 08/03/2004
• Est. Priority Date: 12/10/2001
• Status: Expired due to Fees

• Current Assignee: ALIO Industries, Inc.
• Original Assignee: ALIO Industries, Inc.
• Inventors: Hennessey, C. William
• Primary Examiner(s): Fulton, Christopher W.
• Application Number:
  US10/413,260
• Publication Number:
  US 20030204965A1
• Time in Patent Office: 477 Days
• Field of Search: 336/45, 335/20, 335/33, 336/13, 336/44, 335/58, 335/61
• US Class Current: 33/645
• CPC Class Codes: B25J 17/0216 comprising a stewart mechanism
• CPC Class Codes: B25J 7/00 Micromanipulators specimen supports for investigating or analysing materials G01N23/2204; associated with microscopes G02B21/32; means for supporting or positioning the objects or the material in discharge tubes H01J37/20
• CPC Class Codes: H02N 2/0095 producing combined linear and rotary motion, e.g. multi-direction positioners
• CPC Class Codes: H02N 2/026 by pressing one or more vibrators against the driven body

Abstract

A method and an apparatus for providing nanometer precision motion are provided. According to the invention, a parallel kinematic micromanipulator is formed using at least three kinematic links. The kinematic links may include a high resolution, non-contact encoder to provide position information. Movement of the micromanipulator is effected using piezoelectric linear actuators provided in connection with each of the kinematic links. The combination of a parallel kinematic structure and piezoelectric linear actuators provides a micromanipulator capable of positioning components or instruments with high accuracy or repeatability. In accordance with the present invention, kinematics of three and six degrees of freedom may be provided.

Claims

1. A parallel kinematic manipulator comprising:

a base plate;

a mobile plate; and

a plurality of kinematic links arranged in parallel between the base plate and the mobile plate, wherein each one of the kinematic links comprises;

a first joint coupling the one kinematic link to the base plate and configured to allow the one kinematic link to move relative to the base plate;

a second joint coupling the one kinematic link to the mobile plate and configured to allow the one kinematic link to move relative to the mobile plate; and

a piezoelectric linear actuator assembly configured to move the one kinematic link with a substantially continuous motion.

2. The parallel kinematic manipulator of claim 1 wherein the piezoelectric linear actuator assembly comprises two piezoelectric linear motors positioned on opposite sides of the one kinematic link.

3. The parallel kinematic manipulator of claim 1 wherein the piezoelectric linear actuator assembly comprises two piezoelectric linear motors in contact with the one kinematic link.

4. The parallel kinematic manipulator of claim 1 wherein the first joint comprises a thrust bearing and a universal joint.

5. The parallel kinematic manipulator of claim 1 further comprising an encoder configured to determine lengths of the kinematic links.

6. The parallel kinematic manipulator of claim 1 wherein the encoder comprises a plurality of optical sensors configured to detect positions of the kinematic links.

7. The parallel kinematic manipulator of claim 1 further comprising a controller configured to control lengths of the kinematic links.

8. The parallel kinematic manipulator of claim 1 further comprising a controller configured to determine lengths of the kinematic links to move the mobile plate to a desired position.

9. The parallel kinematic manipulator of claim 1 wherein the mobile plate is relieved.

10. The parallel kinematic manipulator of claim 1 wherein the mobile plate is configured to hold an optical fiber and the parallel kinematic manipulator is configured to align the optical fiber.

11. A method of operating a parallel kinematic manipulator comprising a base plate, a mobile plate, a plurality of kinematic links, first joints coupling the kinematic links to the base plate, second joints coupling the kinematic links to the mobile plate, and a plurality of piezoelectric linear actuator assemblies, wherein the kinematic links are arranged in parallel between the base plate and the mobile plate, the method comprising:

operating the piezoelectric linear actuator assemblies to move the kinematic links with a substantially continuous motion;

in the first joints, allowing the kinematic links to move relative to the base plate; and

in the second joints, allowing the kinematic links to move relative to the mobile plate.

12. The method of claim 11 wherein operating the piezoelectric linear actuator assemblies comprises operating pairs of piezoelectric linear motors positioned on opposite sides of the kinematic links.

13. The method of claim 11 wherein operating the piezoelectric linear actuator assemblies comprises operating pairs of piezoelectric linear motors in contact with the kinematic links.

14. The method of claim 11 wherein allowing the kinematic links to move relative to the base plate comprises using a thrust bearing and a universal joint.

15. The method of claim 11 further comprising determining lengths of the kinematic links.

16. The method of claim 11 further comprising operating optical sensors to detect positions of the kinematic links.

17. The method of claim 11 wherein operating the piezoelectric linear actuator assemblies to move the kinematic links comprises controlling lengths of the kinematic links.

18. The method of claim 11 further comprising determining lengths of the kinematic links to move the mobile plate to a desired position.

19. The method of claim 11 wherein the mobile plate is relieved.

20. The method of claim 11 further comprising holding an optical fiber with the mobile plate, and wherein operating the piezoelectric linear actuator assemblies to move the kinematic links comprises aligning the optical fiber.