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Actuator-integrated force sensor

  • US 6,772,647 B2
  • Filed: 09/09/2002
  • Issued: 08/10/2004
  • Est. Priority Date: 12/07/1999
  • Status: Expired due to Term
First Claim
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1. A device for measuring force in a force flux, comprising a force sensor integrated in an actuator, said actuator having a bottom which is formed transversely with respect to the force flux and on which the force acts centrally, and a supporting ring for transmitting the force, arranged peripherally on an outer edge of the actuator bottom in the direction of force, the actuator bottom capable of being deformed by the force and comprising part of the force sensor, whereby a detectable deformation of the actuator bottom constitutes a measure of the force, the deformation comprising a central deflection of the actuator bottom relative to the edge of said actuator, and the deflection being detectable by a plate capacitor configuration having an electrode positioned on an electrode mount which is pressed, with spring support, onto a base, and wherein the actuator bottom serves as a corresponding electrode.

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