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Panel-type peripheral device and method of producing the same

  • US 6,777,631 B2
  • Filed: 07/27/2001
  • Issued: 08/17/2004
  • Est. Priority Date: 07/27/2000
  • Status: Expired due to Fees
First Claim
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1. A method of producing a panel-type peripheral device including a pair of conductive panel members, each conductive panel member being provided with an insulating substrate and a conductive film on a first side of said insulating substrate, comprising:

  • providing a panel assembly including said pair of conductive panel members fixed to each other with respective conductive films thereof oppositely facing to each other through a gap defined therebetween, said panel assembly having a passage for communicating said gap with an environment outside of said panel assembly, said gap being hermetically sealed against the environment at a region other than said passage;

    providing a support member having a rigidity higher than that of at least one of said conductive panel members of said panel assembly, said support member including a support surface larger than a second side of said insulating substrate, opposite to said first side, of said at least one of said conductive panel members;

    providing a receptacle accommodating a liquid material;

    placing said panel assembly, said support member and said receptacle in a common environment;

    securely arranging said support member over and adjacent to said at least one of said conductive panel members of said panel assembly with said support surface oppositely facing to said second side of said insulating substrate;

    depressurizing said common environment while said passage of said panel assembly is exposed to said common environment, to evacuate said gap in said panel assembly;

    immersing said passage of said panel assembly into said liquid material in said receptacle under said common environment as depressurized; and

    increasing a pressure of said common environment as depressurized, to cause a flow of said liquid material from said receptacle into said gap in said panel assembly through said passage, and to fill said gap with said liquid material, without directly applying said pressure of said common environment onto said at least one of said conductive panel members arranged adjacent to said support member.

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