Recording media having protective overcoats of highly tetrahedral amorphous carbon and methods for their production
DCFirst Claim
1. Magnetic recording media comprising:
- a substrate;
a magnetic layer disposed over the substrate; and
a protective layer disposed over the magnetic layer, the protective layer comprising a highly tetrahedral amorphous carbon having a thickness of less than 80 Å
.
4 Assignments
Litigations
0 Petitions
Reexaminations
Accused Products
Abstract
The invention provides systems and methods for the deposition of an improved diamond-like carbon material, particularly for the production of magnetic recording media. The diamond-like carbon material of the present invention is highly tetrahedral, that is, it features a large number of the sp3 carbon—carbon bonds which are found within a diamond crystal lattice. The material is also amorphous, providing a combination of short-range order with long-range disorder, and can be deposited as films which are ultrasmooth and continuous at thicknesses substantially lower than known amorphous carbon coating materials. The carbon protective coatings of the present invention will often be hydrogenated. In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma. Such inductive ionization is enhanced by a relatively slow moving (or “quasi-static”) magnetic field, which promotes resonant ionization and ion beam homogenization.
47 Citations
14 Claims
-
1. Magnetic recording media comprising:
-
a substrate;
a magnetic layer disposed over the substrate; and
a protective layer disposed over the magnetic layer, the protective layer comprising a highly tetrahedral amorphous carbon having a thickness of less than 80 Å
.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
-
13. Magnetic recording media comprising:
-
a substrate;
a magnetic layer disposed over the substrate; and
a protective layer disposed over the magnetic layer, the protective layer comprising a highly tetrahedral amorphous carbon having a thickness of less than 80 Å and
a density of more than 2.5 g/cm3.
-
-
14. Magnetic recording media comprising:
-
a substrate;
a magnetic layer disposed over the substrate; and
a protective layer disposed over the magnetic layer, the protective layer comprising a highly tetrahedral amorphous carbon having a percentage of sp3 carbon—
carbon bonds which increases as the protective layer thickness decreases.
-
Specification