Patterned diffractive light modulator ribbon for PDL reduction

• US 6,806,997 B1
• Filed: 02/28/2003
• Issued: 10/19/2004
• Est. Priority Date: 02/28/2003
• Status: Active Grant

• Current Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Original Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Inventors: Dueweke, Michael, Gudernan, Christopher, Maheshwari, Dinesh, Trisnadi, Jahja I.
• Primary Examiner(s): Schwartz, Jordan M.
• Assistant Examiner(s): STULTZ, JESSICA T
• Application Number:
  US10/377,912
• Time in Patent Office: 599 Days
• Field of Search: 359/237, 359/298, 359/302, 359/563, 359/318, 359/569, 359/567, 359/558, 359/209-9, 359/571, 359/573-6, 359/270, 359/223-4, 345/85
• US Class Current: 359/302
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements

Abstract

A modulator for modulating an incident beam of light. The modulator includes a plurality of elements, each element including a first end, a second end, a first linear side, a second linear side, and a continuous or non-continuous light reflective planar surface plurality of elements are arranged parallel to each other and further wherein the light reflective planar surface of each of the plurality of elements includes a first non-linear side and a second non-linear side. The modulator also includes a support structure coupled to each end of the plurality of elements to enable movement between a first modulator configuration wherein the plurality of elements act to reflect the incident beam of light as a plane mirror, and a second modulator configuration wherein the plurality of elements act to diffract the incident beam of light.

Claims

1. A modulator for modulating an incident beam of light comprising:

a. a plurality of elements, each element including a first end, a second end, a first linear side, a second linear side, and a light reflective planar surface with the light reflective planar surfaces of the plurality of elements lying in one or more parallel planes, wherein the plurality of elements are arranged parallel to each other and further wherein the light reflective planar surface of each of the plurality of elements includes a first non-linear side and a second non-linear side; and

b. a support structure coupled to each end of the plurality of elements to maintain a position of each element relative to each other and to enable movement of selective ones of the plurality of elements in a direction normal to the one or more parallel planes of the plurality of elements, and between a first modulator configuration wherein the plurality of elements act to reflect the incident beam of light as a plane mirror, and a second modulator configuration wherein the plurality of elements act to diffract the incident beam of light.

2. The modulator according to claim 1 wherein the first non-linear side and the second non-linear side each include one or more projections, wherein each projection is perpendicular to each of the linear sides of the element.

3. The modulator according to claim 2 wherein the one or more projections do not extend beyond the first linear side and the second linear side.

4. The modulator according to claim 3 wherein each projection on the first non-linear side is repeated according to a constant period, and each projection on the second non-linear side is repeated according to a constant period.

5. The modulator according to claim 4 wherein the shape of each projection is the same.

6. The modulator according to claim 5 wherein the projections on the first non-linear side are symmetric in relation to the projections on the second non-linear side.

7. The modulator according to claim 6 wherein the non-linear sides of adjacent elements are symmetrical.

8. The modulator according to claim 1 wherein the modulator is a diffractive MEMS device.

9. The modulator according to claim 1 wherein the selective ones of the elements are alternating elements and are moved by applying an electrostatic force.

10. A modulator for modulating an incident beam of light comprising:

a. a plurality of elements, each element including a first end, a second end, a first linear side, a second linear side, and a non-continuous light reflective planar surface with the non-continuous light reflective planar surfaces of the plurality of elements lying in one or more parallel planes, wherein the elements are arranged parallel to each other and further wherein the non-continuous light reflective planar surface of each of the plurality of elements includes a first non-linear side and a second non-linear side; and

b. a support structure coupled to each end of the plurality of elements to maintain a position of each element relative to each other and to enable movement of selective ones of the plurality of elements in a direction normal to the one or more parallel planes of the plurality of elements, and between a first modulator configuration wherein the plurality of elements act to reflect the incident beam of light as a plane mirror, and a second modulator configuration wherein the plurality of elements act to diffract the incident beam of light.

11. The modulator according to claim 10 wherein the first non-linear side and the second non-linear side each include one or more projections, wherein each projection is perpendicular to each of the linear sides of the element.

12. The modulator according to claim 11 wherein the one or more projections do not extend beyond the first linear side and the second linear side.

13. The modulator according to claim 12 wherein each projection on the first non-linear side is repeated according to a constant period, and each projection on the second non-linear side is repeated according to a constant period.

14. The modulator according to claim 13 wherein the shape of each projection is the same.

15. The modulator according to claim 14 wherein the projections on the first non-linear side are symmetric in relation to the projections on the second non-linear side.

16. The modulator according to claim 15 wherein the non-linear sides of adjacent elements are symmetrical.

17. The modulator according to claim 10 wherein the modulator is a diffractive MEMS device.

18. The modulator according to claim 10 wherein the selective ones of the elements are alternating elements and are moved by applying an electrostatic force.

19. The modulator according to claim 10 wherein the non-continuous portion of each of the light reflective planar surfaces is non-reflective.

20. A modulator for modulating an incident beam of light comprising:

a. means for supporting each of a plurality of elements to maintain a position of each element relative to each other and to enable movement of selective ones of the plurality of elements in a direction normal to the one or more parallel planes of the plurality of elements, wherein each element includes a first end, a second end, a first linear side, a second linear side, and a light reflective planar surface with the light reflective planar surfaces of the plurality of elements lying in one or more parallel planes, and the elements are arranged parallel to each other and further wherein the light reflective planar surfaces of each of the plurality of elements includes a first non-linear side and a second non-linear side; and

b. means for moving selective ones of the plurality of elements between a first modulator configuration wherein the plurality of elements act to reflect the incident beam of light as a plane mirror, and a second modulator configuration wherein the plurality of elements act to diffract the incident beam of light.