Method for registering a deposited material with channel plate channels, and switch produced using same

• US 6,809,277 B2
• Filed: 01/22/2003
• Issued: 10/26/2004
• Est. Priority Date: 01/22/2003
• Status: Expired due to Fees

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Wong, Marvin Glenn, Carson, Paul Thomas
• Primary Examiner(s): Friedhofer, Michael
• Assistant Examiner(s): HOMZA, LISA NHUNG
• Application Number:
  US10/349,712
• Publication Number:
  US 20040140187A1
• Time in Patent Office: 643 Days
• Field of Search: 200/181-286, 200/61.02, 219/209, 219/210, 310/328, 310/363, 310/365
• US Class Current: 200/182
• CPC Class Codes: B81B 2201/018 Switches not provided for in B81B2201/014 - B81B2201/016
• CPC Class Codes: B81C 1/00611 Processes for the planarisation of structures planarising depositions C23C, H01L
• CPC Class Codes: B81C 2201/0121 involving addition of material followed by removal of parts of said material, i.e. subtractive planarization
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2029/008 using micromechanics, e.g. micromechanical liquid contact switches or [LIMMS]

Abstract

A method for depositing material on a channel plate such that the material is registered to one or more channels formed in the channel plate includes filling at least one of the channels with a resist that is not wetted by the material; depositing the material on at least a region of the channel plate that includes at least part of the resist; and then removing the resist. The method may be used, in one embodiment, to apply an adhesive or gasket material that is used in assembling a switch.

Claims

1. A switch, produced by:

a) forming at least one channel in a channel plate;

b) filling at least one of the channels with a resist that is not wetted by a material that is to be deposited on the channel plate;

c) depositing the material on at least a region of the channel plate that at least abuts a portion of the resist, the material registering with at least one channel edge as a result of the material'"'"'s abutment to the resist;

d) removing the resist; and

e) aligning the at least one channel formed in the channel plate with at least one feature on a substrate, and sealing, by means of the deposited material, at least a switching fluid between the channel plate and the substrate.

2. The switch of claim 1, further comprising, curing the deposited material prior to removing the resist.

3. The switch of claim 1, wherein the deposited material is an adhesive.

4. The switch of claim 1, wherein the deposited material is a gasket material.

5. The switch of claim 1, wherein the material is deposited by means of spin coating.

6. The switch of claim 1, wherein the material is deposited by means of spray coating.

7. The switch of claim 1, wherein:

a) a first channel formed in the channel plate is a channel for holding the switching fluid; and

b) the channel for holding the switching fluid is filled with the resist.

8. The switch of claim 7, wherein:

a) a second channel formed in the channel plate is an actuating fluid channel;

b) the actuating fluid channel is filled with the resist; and

c) the method further comprises sealing an actuating fluid between the channel plate and the substrate, said actuating fluid serving to apply forces to said switching fluid to thereby change the state of said switching fluid.

9. The switch of claim 1, wherein:

a) the at least one channel formed in the channel plate comprises a channel for holding the switching fluid, a pair of channels for holding an actuating fluid, said actuating fluid serving to apply forces to said switching fluid to thereby change the state of said switching fluid, and a pair of channels connecting corresponding ones of the channels holding the actuating fluid to the channel holding the switching fluid; and

b) all of the channels are filled with the resist.

10. A channel plate for a switch, comprising:

a) at least one channel formed therein;

b) a removable resist filling at least one of said channels, the resist being unwettable by a material that is to be deposited on the channel plate;

c) said material, deposited on at least a region of the channel plate that at least abuts a portion of the resist, the material thereby registering with at least one channel edge as a result of the material'"'"'s abutment to the resist.

11. The channel plate of claim 10, wherein the deposited material is an adhesive.

12. The channel plate of claim 10, wherein the deposited material is a gasket material.