Method and apparatus for determining the pass through flux of magnetic materials

• US 6,821,552 B2
• Filed: 07/17/2002
• Issued: 11/23/2004
• Est. Priority Date: 06/01/2000
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Xu, Yun, Turner, Stephen, Guo, Wei
• Primary Examiner(s): VERSTEEG, STEVEN H
• Application Number:
  US10/198,296
• Publication Number:
  US 20030006132A1
• Time in Patent Office: 860 Days
• Field of Search: 204/192.12, 204/298.13, 204/298.17, 204/298.03, 204/192.13, 118/712, 427/8, 738/06, 324/200, 324/260, 324/251, 324/259, 324/246
• US Class Current: 427/8
• CPC Class Codes: G01R 33/10 Plotting field distribution ; Measuring field distribution

Abstract

The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z directions. The apparatus also comprises a magnet field source or arrangement of magnet field sources which are placed beneath the material being characterized and includes a mechanism whereby the magnetic material can be mapped by the movement of any one or combination of: magnetic field source or sources, sensors and magnetic material. The invented method comprises the use of various configurations of magnetic sources in order to generate a magnetic field that emulates the open-loop condition found in magnetron sputtering.

Claims

1. An apparatus for determining the pass through flux of a magnetic material comprising:

at least one magnetic source including at least one ring-shaped electromagnet generating a magnetic field passing through the magnetic material;

one or more magnetic field detectors configured to measure one or more of x and y components of the magnetic field; and

a mechanism configured to move one or more of the magnetic source, magnetic field detectors, and magnetic material.

2. The apparatus of claim 1 further comprising a device configured to generate a pass through flux value using measurements from the one or more magnetic field detectors.

3. The apparatus of claim 1 further comprising a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material.

4. The apparatus of claim 1 wherein the magnetic material comprises a sputtering target.

5. The apparatus of claim 1 wherein the at least one magnetic source is beneath the magnetic material.

6. The apparatus of claim 1 wherein the at least one magnetic source comprises at least two magnetic sources.

7. The apparatus of claim 1 wherein the at least one ring-shaped magnet comprises a single ring-shaped magnet and surrounds a solid magnet.

8. The apparatus of claim 1 wherein the at least one ring-shaped magnet comprises a first ring-shaped magnet within a second ring-shaped magnet.

9. The apparatus of claim 1 wherein the magnetic source comprises only one ring-shaped magnet.

10. The apparatus of claim 1 wherein the one or more magnetic field detectors comprise two or more magnetic field detectors configured to measure two or more of x, y, and z components of the magnetic field.

11. An apparatus for determining the pass through flux of a magnetic material comprising:

at least one magnetic source beneath the magnetic material, the magnetic source generating a magnetic field;

one or more magnetic field detectors configured to measure at least a x component of the magnetic field;

a mechanism configured to move one or more of said magnetic source, magnetic field detectors and magnetic material; and

a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material.

12. An apparatus for determining the pass through flux of a magnetic material comprising:

at least one magnetic source beneath the magnetic material, the magnetic source generating a magnetic field;

one or more magnetic field detectors configured to measure at least a y component of the magnetic field;

a mechanism configured to move one or more of said magnetic source, magnetic field detectors and magnetic material; and

a processor in data communication with the magnetic field detectors and configured to generate a map of pass through flux of the magnetic material.

13. A method for determining the pass through flux of a magnetic material comprising:

generating a magnetic field on one side of the magnetic material and passing the magnetic field through the magnetic material and out an other side of the magnetic material;

collecting magnetic field vector information at the other side of the magnetic material with two or more detectors configured to measure two or mere of the x, y, and z components of the magnetic field; and

moving one or more of the magnetic field, the at least one of the two or more detectors, and the magnetic material during the collecting.

14. The method of claim 13 wherein the one side of the magnetic material comprises a bottom side and the other side of the magnetic material comprises a top side.

15. The method of claim 13 comprising collecting magnetic field vector information with three detectors configured to measure one or more of the x, y, and z components of the magnetic field.

16. The method of claim 13 wherein the magnetic field is generated by a magnet.

17. The method of claim 13 wherein the magnetic field is generated by two or more magnetic sources.