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Kind of thin films for microsystem technology and microstructuring and their use

  • US 6,821,692 B1
  • Filed: 02/04/1999
  • Issued: 11/23/2004
  • Est. Priority Date: 08/23/1996
  • Status: Expired due to Fees
First Claim
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1. A microstructurable thin layer consisting essentially of an enzymatically degradable biopolymer having an inhibitor or a competitor of the enzymatic degradability of said biopolymer on at least part of its surface, the thin layer having a thickness of 30 nm to 3 μ

  • m, said layer being enzymatically degradable by a suitable individual enzyme.

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