Method of manufacturing a semiconductor device

• US 6,821,828 B2
• Filed: 09/24/2002
• Issued: 11/23/2004
• Est. Priority Date: 09/27/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Suzuki, Noriyoshi, Asami, Taketomi, Ichijo, Mitsuhiro
• Primary Examiner(s): Lebentritt, Michael
• Application Number:
  US10/252,838
• Publication Number:
  US 20030082859A1
• Time in Patent Office: 791 Days
• Field of Search: 438/149-166
• US Class Current: 438/166
• CPC Class Codes: H01L 21/0237 Materials
• CPC Class Codes: H01L 21/02422 Non-crystalline insulating materials, e.g. glass, polymers
• CPC Class Codes: H01L 21/02488 Insulating materials
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02592 amorphous
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/02672 using crystallisation enhancing elements
• CPC Class Codes: H01L 21/02686 Pulsed laser beam
• CPC Class Codes: H01L 21/3221 of silicon bodies, e.g. for gettering
• CPC Class Codes: H01L 21/3223 using cavities formed by hydrogen or noble gas ion implantation
• CPC Class Codes: H01L 27/1277 using a crystallisation promoting species, e.g. local introduction of Ni catalyst

Abstract

A technique of reducing fluctuation between elements is provided in which a semiconductor film having a crystal structure is obtained by using a metal element that accelerates crystallization of a semiconductor film and then the metal element remaining in the film is removed effectively. A barrier layer is formed on a semiconductor film having a crystal structure by plasma CVD from monosilane and nitrous oxide as material gas. In a step of forming a gettering site, a semiconductor film having an amorphous structure and containing a high concentration of noble gas element, specifically, 1×10²⁰ to 1×10²¹ /cm³, is formed by plasma CVD. The film is typically an amorphous silicon film. Then gettering is conducted.

Claims

1. A method of manufacturing a semiconductor device, comprising:

forming on an insulating surface a first semiconductor film having an amorphous structure;

providing the first semiconductor film with a material comprising a metal element;

crystallizing the first semiconductor film to form a first semiconductor film having a crystal structure after providing said material;

forming a barrier layer on the crystallized first semiconductor film;

forming a second semiconductor film containing a noble gas element on the barrier layer;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film; and

removing the barrier layer.

2. A method of manufacturing a semiconductor device according to claim 1, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

3. A method of manufacturing a semiconductor device according to claim 2, wherein the silicon oxynitride film is formed by plasma CVD in which silane-based gas and nitrogen oxide-based gas are introduced as material gas into a film forming chamber to generate plasma.

4. A method of manufacturing a semiconductor device according to claim 1, wherein forming the barrier layer and forming the second semiconductor film are carried out using plasma CVD without exposing the device to the air.

9. A method of manufacturing a semiconductor device according to claim 1, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane and noble gas are introduced as material gas into a film forming chamber to generate plasma.

12. A method of manufacturing a semiconductor device according to claim 1, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane, noble gas, and hydrogen are introduced as material gas into a film forming chamber to generate plasma.

15. A method of manufacturing a semiconductor device according to claim 1, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane, noble gas, and nitrogen are introduced as material gas into a film forming chamber to generate plasma.

18. A method of manufacturing a semiconductor device according to claim 1, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane and phosphine are introduced as material gas into a film forming chamber to generate plasma.

26. A method of manufacturing a semiconductor device according to claim 1, wherein a noble gas element is introduced to generate plasma and change the surface condition of the barrier layer before forming the second semiconductor film.

29. A method of manufacturing a semiconductor device according to claim 1, wherein a noble gas element is introduced to generate plasma and change the surface condition of the first semiconductor film before forming the barrier layer.

32. A method of manufacturing a semiconductor device according to claim 1, wherein impurities on the surface of the first semiconductor film are removed before forming the barrier layer.

35. A method of manufacturing a semiconductor device according to claim 1, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

38. A method of manufacturing a semiconductor device according to claim 1, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

5. A method of manufacturing a semiconductor device, comprising:

forming on an insulating surface a first semiconductor film having an amorphous structure;

providing the first semiconductor film with a material comprising a metal element;

crystallizing the first semiconductor film to form a first semiconductor film having a crystal structure after providing said material;

forming a barrier layer on the crystallized first semiconductor film;

forming a second semiconductor film on the barrier layer, the second semiconductor film containing a noble gas element with a concentration gradient set higher toward the film surface;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film; and

removing the barrier layer.

7. A method of manufacturing a semiconductor device according to claim 5, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

10. A method of manufacturing a semiconductor device according to claim 5, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane and noble gas are introduced as material gas into a film forming chamber to generate plasma.

13. A method of manufacturing a semiconductor device according to claim 5, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane, noble gas, and hydrogen are introduced as material gas into a film forming chamber to generate plasma.

16. A method of manufacturing a semiconductor device according to claim 5, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane, noble gas, and nitrogen are introduced as material gas into a film forming chamber to generate plasma.

19. A method of manufacturing a semiconductor device according to claim 5, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane and phosphine are introduced as material gas into a film forming chamber to generate plasma.

24. A method of manufacturing a semiconductor device according to claim 5, wherein the barrier layer is a silicon oxynitride film formed by plasma CVD in which silane-based gas and nitrogen oxide-based gas are introduced as material gas into a film forming chamber to generate plasma.

27. A method of manufacturing a semiconductor device according to claim 5, wherein a noble gas element is introduced to generate plasma and change the surface condition of the barrier layer before forming the second semiconductor film.

30. A method of manufacturing a semiconductor device according to claim 5, wherein a noble gas element is introduced to generate plasma and change the surface condition of the first semiconductor film before forming the barrier layer.

33. A method of manufacturing a semiconductor device according to claim 5, wherein impurities on the surface of the first semiconductor film are removed before forming the barrier layer.

36. A method of manufacturing a semiconductor device according to claim 5, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

39. A method of manufacturing a semiconductor device according to claim 5, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

6. A method of manufacturing a semiconductor device, comprising:

forming on an insulating surface a first semiconductor film having an amorphous structure;

providing the first semiconductor film with a material comprising a metal element;

crystallizing the first semiconductor film to form a first semiconductor film having a crystal structure after providing said material;

forming a barrier layer on the crystallized first semiconductor film;

forming a second semiconductor film on the barrier layer, the second semiconductor film containing a noble gas element;

forming a third semiconductor film on the second semiconductor film, the third semiconductor film containing a noble gas element in a concentration higher than the noble gas element concentration in the second semiconductor film;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film and the third semiconductor film; and

removing the barrier layer.

8. A method of manufacturing a semiconductor device according to claim 6, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

11. A method of manufacturing a semiconductor device according to claim 6, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane and noble gas are introduced as material gas into a film forming chamber to generate plasma.

14. A method of manufacturing a semiconductor device according to claim 6, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane, noble gas, and hydrogen are introduced as material gas into a film forming chamber to generate plasma.

17. A method of manufacturing a semiconductor device according to claim 6, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane, noble gas, and nitrogen are introduced as material gas into a film forming chamber to generate plasma.

20. A method of manufacturing a semiconductor device according to claim 6, wherein the second semiconductor film is formed by plasma CVD in which at least monosilane and phosphine are introduced as material gas into a film forming chamber to generate plasma.

21. A method of manufacturing a semiconductor device according to claim 6, wherein the third semiconductor film is formed by plasma CVD in which at least monosilane and noble gas are introduced as material gas into a film forming chamber to generate plasma.

22. A method of manufacturing a semiconductor device according to claim 6, wherein the third semiconductor film is formed by plasma CVD in which at least monosilane, noble gas, and hydrogen are introduced as material gas into a film forming chamber to generate plasma.

23. A method of manufacturing a semiconductor device according to claim 6, wherein a noble gas element is introduced to generate plasma and change the surface condition of the second semiconductor film before forming the third semiconductor film.

25. A method of manufacturing a semiconductor device according to claim 6, wherein the barrier layer is a silicon oxynitride film formed by plasma CVD in which silane-based gas and nitrogen oxide-based gas are introduced as material gas into a film forming chamber to generate plasma.

28. A method of manufacturing a semiconductor device according to claim 6, wherein a noble gas element is introduced to generate plasma and change the surface condition of the barrier layer before forming the second semiconductor film.

31. A method of manufacturing a semiconductor device according to claim 6, wherein a noble gas element is introduced to generate plasma and change the surface condition of the first semiconductor film before forming the barrier layer.

34. A method of manufacturing a semiconductor device according to claim 6, wherein impurities on the surface of the first semiconductor film are removed before forming the barrier layer.

37. A method of manufacturing a semiconductor device according to claim 6, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

40. A method of manufacturing a semiconductor device according to claim 6, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

41. A method of manufacturing a semiconductor device, comprising:

forming on an insulating surface a first semiconductor film having an amorphous structure;

providing the first semiconductor film with a material comprising a metal element;

crystallizing the first semiconductor film to form a first semiconductor film having a crystal structure after providing said material;

forming a barrier layer on the crystallized first semiconductor film;

forming a second semiconductor film containing a noble gas element on the barrier layer;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film; and

removing the barrier layer,

wherein the barrier layer and the second semiconductor film are formed successively without exposing the substrate to the air.

42. A method of manufacturing a semiconductor device according to claim 41, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

43. A method of manufacturing a semiconductor device according to claim 41, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

44. A method of manufacturing a semiconductor device according to claim 41, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

45. A method of manufacturing a semiconductor device, comprising:

forming on an insulating surface a first semiconductor film having an amorphous structure;

providing the first semiconductor film with a material comprising a metal element;

crystallizing the first semiconductor film to form a first semiconductor film having a crystal structure after providing said material;

forming a barrier layer on the crystallized first semiconductor film;

exposing a surface of the barrier layer to a plasma including a noble gas element;

forming a second semiconductor film containing a noble gas element on the barrier layer;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film; and

removing the barrier layer.

46. A method of manufacturing a semiconductor device according to claim 45, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

47. A method of manufacturing a semiconductor device according to claim 45, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

48. A method of manufacturing a semiconductor device according to claim 45, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

49. A method of manufacturing a semiconductor device, comprising:

forming on an insulating surface a first semiconductor film having an amorphous structure;

providing the first semiconductor film with a material comprising a metal element;

crystallizing the first semiconductor film to form a first semiconductor film having a crystal structure after providing said material;

exposing a surface of the crystallized first semiconductor film to plasma including a noble gas element;

forming a barrier layer on the crystallized first semiconductor film;

forming a second semiconductor film containing a noble gas element on the barrier layer;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film; and

removing the barrier layer.

50. A method of manufacturing a semiconductor device according to claim 49, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

51. A method of manufacturing a semiconductor device according to claim 49, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

52. A method of manufacturing a semiconductor device according to claim 49, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

53. A method of manufacturing a semiconductor device, comprising:

forming a barrier layer on the crystallized first semiconductor film;

forming a second semiconductor film containing a noble gas element on the barrier layer;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film; and

removing the barrier layer.

56. A method of manufacturing a semiconductor device according to claim 53, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

59. A method of manufacturing a semiconductor device according to claim 53, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

62. A method of manufacturing a semiconductor device according to claim 53, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

54. A method of manufacturing a semiconductor device, comprising:

forming a barrier layer on a crystallized first semiconductor film;

forming a second semiconductor film on the barrier layer, the second semiconductor film containing a noble gas element with a concentration gradient set higher toward the film surface;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film; and

removing the barrier layer.

57. A method of manufacturing a semiconductor device according to claim 54, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

60. A method of manufacturing a semiconductor device according to claim 54, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

63. A method of manufacturing a semiconductor device according to claim 54, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.

55. A method of manufacturing a semiconductor device, comprising:

forming a barrier layer on a crystallized first semiconductor film;

forming a second semiconductor film on the barrier layer, the second semiconductor film containing a noble gas element;

forming a third semiconductor film on the second semiconductor film, the third semiconductor film containing a noble gas element in a concentration higher than the noble gas element concentration in the second semiconductor film;

removing at least a portion of the metal element from the crystallized first semiconductor film by gettering the metal element into the second semiconductor film;

removing the second semiconductor film and the third semiconductor film; and

removing the barrier layer.

58. A method of manufacturing a semiconductor device according to claim 55, wherein the barrier layer is a silicon oxynitride film with a thickness of 1 to 10 nm.

61. A method of manufacturing a semiconductor device according to claim 55, wherein the metal element is one or more kinds of elements selected from the group consisting of Fe, Ni, Co, Ru, Rh, Pd, Os, Ir, Pt, Cu, and Au.

64. A method of manufacturing a semiconductor device according to claim 55, wherein the noble gas element is one or more kinds of elements selected from the group consisting of He, Ne, Ar, Kr, and Xe.