Light modulator structure for producing high-contrast operation using zero-order light
First Claim
1. A light modulator for modulating an incident light beam comprising a plurality of elements selectively operable in a first mode and a second mode, wherein a gap between adjacent elements is equal to or less than a wavelength of the incident light beam, where the plurality of elements in the first mode reflects light along a return path, where the plurality of elements in the second mode directs light both along and away from the return path, whereby modulation of the incident light beam is performed by collecting zero order light along the return path.
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Accused Products
Abstract
An optical system provides high-contrast operation by collecting zero order light. The optical system comprises a light modulator and a collector. The light modulator is preferably a grating light valve™ light modulator including a plurality of elements selectively operable in a first mode and a second mode, wherein a gap between adjacent elements is equal to or less than a wavelength of an incident light beam. The plurality of elements in the first mode reflect light along a return path, where the plurality of elements in the second mode direct light away from the return path. The collector is coupled to the light modulator to collect zero order light along the return path while the plurality of elements are in the first mode and to collect zero order light along the return path while the plurality of elements are in the second mode.
771 Citations
18 Claims
- 1. A light modulator for modulating an incident light beam comprising a plurality of elements selectively operable in a first mode and a second mode, wherein a gap between adjacent elements is equal to or less than a wavelength of the incident light beam, where the plurality of elements in the first mode reflects light along a return path, where the plurality of elements in the second mode directs light both along and away from the return path, whereby modulation of the incident light beam is performed by collecting zero order light along the return path.
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8. An optical system for providing high-contrast operation by collecting zero order light, the optical system comprising:
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a. a light modulator including a plurality of elements selectively operable in a first mode and a second mode, wherein a gap between adjacent elements is equal to or less than a wavelength of an incident light beam, where the plurality of elements in the first mode reflects light along a return path, where the plurality of elements in the second mode directs light both along and away from the return path; and
b. a collector coupled to the light modulator to collect zero order light along the return path while the plurality of elements are in the first mode and to collect zero order light along the return path while the plurality of elements are in the second mode. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An optical system for providing high-contrast operation by collecting zero order light, the optical system comprising:
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a. means for collecting zero order light along a return path; and
b. means for modulating an incident light beam comprising a plurality of elements selectively operable in a first mode and a second mode, wherein a gap between adjacent elements is equal to or less than a wavelength of an incident light beam, where the plurality of elements in the first mode reflects light along the return path, where the plurality of elements in the second mode directs light both along and away from the return path.
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Specification