Twin P-well CMOS imager

• US 6,825,878 B1
• Filed: 12/08/1998
• Issued: 11/30/2004
• Est. Priority Date: 12/08/1998
• Status: Expired due to Term

• Current Assignee: Round Rock Research LLC
• Original Assignee: Micron Technology, Inc.
• Inventors: Rhodes, Howard E.
• Primary Examiner(s): Garber, Wendy R.
• Assistant Examiner(s): VILLECCO, JOHN M
• Application Number:
  US09/207,138
• Time in Patent Office: 2,184 Days
• Field of Search: 348/297, 348/302, 348/306, 348/307, 348/308, 348/309, 348/311, 348/313, 250/208.1, 257/299, 257/222, 257/223, 257/431, 257/432, 257/225
• US Class Current: 348/308
• CPC Class Codes: H01L 27/14609 Pixel-elements with integrated switching, control, storage or amplification elements scanning details of imagers (circuitry of solid-state image sensors H04N25/00); circuitry of imagers H04N25/70

Abstract

A CMOS imager which includes a substrate voltage pump to bias a doped area of a substrate to prevent leakage into the substrate from the transistors formed in the doped area. The invention also provides a CMOS imager where a photodetector sensor array is formed in a first p-well and readout logic is formed in a second p-well. The first p-well can be selectively doped to optimize cross-talk, collection efficiency and transistor leakage, thereby improving the quantum efficiency of the sensor array while the second p-well can be selectively doped and/or biased to improve the speed and drive of the readout circuitry.

Claims

1. An imaging device comprising:

at least one pixel circuit including;

a photosensitive device within a substrate for accumulating photo-generated charge;

a floating diffusion node formed in said substrate for receiving and storing charges from said photosensitive device;

at least one transistor formed on said substrate having a first voltage threshold which is used in operating said pixel;

an output node for providing a pixel signal; and

a readout circuit comprising at least one transistor which is formed on said substrate used in operation of said readout circuit, said at least one transistor being coupled to receive a signal from said pixel output node and having a second voltage threshold which is lower than said first voltage threshold, said at least one transistor providing an output signal based on a signal received from said pixel circuit; and

a substrate voltage pump coupled to a supply voltage and connected to supply said substrate with a voltage.

2. The imaging device according to claim 1, wherein the accumulation of charge in said photosensitive device is controlled by a photogate.

3. The imaging device according to claim 1, wherein said photosensitive device is a photodiode.

4. The imaging device according to claim 1, wherein said at least one transistor of said at least one pixel circuit controllably transfers charge from said photosensitive device to said floating diffusion node, said floating diffusion node being coupled to a gate of a source follower transistor.

5. The imaging device according to claim 1, wherein said substrate voltage pump provides a negative voltage to said substrate.

6. The imaging device according to claim 5, wherein said substrate voltage pump provides a voltage of from about −

0.25 volts to about −

2.5 volts to said substrate.

7. The imaging device according to claim 5, wherein said substrate voltage pump provides a voltage of from about −

0.70 volts to about −

1.50 volts to said substrate.

8. The imaging device according to claim 5, wherein said substrate voltage pump provides a voltage of about −

1.1 volts to said substrate.

9. The imaging device according to claim 1, wherein said substrate voltage pump provides a positive charge to said substrate.

10. The imaging device according to claim 9, wherein said substrate voltage pump provides a voltage of from about 0.25 volts to about 2.5 volts to said substrate.

11. The imaging device according to claim 9, wherein said substrate voltage pump provides a voltage of from about 0.7 volts to about 1.50 volts to said substrate.

12. The imaging device according to claim 9, wherein said substrate voltage pump provides a voltage of about 1.1 volts to said substrate.

13. The device of claim 1, wherein said at least one transistor of said at least one pixel circuit is a reset transistor for resetting said floating diffusion node to a predetermined voltage.

14. The device of claim 1, wherein said at least one transistor of said at least one pixel circuit is a row select transistor for selectively gating an output of said output transistor.

15. The device of claim 1, wherein said at least one transistor of said at least one pixel circuit is a source follower transistor for receiving photo-generated charge from said floating diffusion node.

16. An imaging device comprising:

an array of pixels, each pixel including;

a photosensitive device formed in a substrate for causing accumulation of the photo-generated charge in an underlying portion of said substrate;

a floating diffusion node formed in said substrate for receiving and storing charges from said photosensitive device;

at least one transistor formed on said substrate having a first voltage threshold which is used in operating said pixel;

an output node for providing a pixel signal; and

a readout circuit comprising at least one transistor which is formed on said substrate used in operation of said readout circuit, said at least one transistor being coupled to receive a signal from said pixel output node and having a second voltage threshold which is lower than said first voltage threshold, said at least one transistor providing an output signal based on a signal received from said pixel circuit; and

at least one substrate voltage pump coupled to a supply voltage and connected to supply said substrate with a voltage.

17. The imaging device according to claim 16, wherein said photosensitive device is a photogate.

18. The imaging device according to claim 16, wherein said photosensitive device is a photodiode.

19. The imaging device according to claim 16, wherein said at least one transistor of said pixel controllably transfers charge from said photosensitive device to said floating diffusion node, said floating diffusion node being coupled to a gate of a source follower transistor.

20. The imaging device according to claim 16, wherein said wherein said substrate voltage pump provides a negative voltage to said substrate.

21. The imaging device according to claim 20, wherein said substrate voltage pump provides a voltage of from about −

0.25 volts to about −

2.5 volts to said substrate.

22. The imaging device according to claim 20, wherein said substrate voltage pump provides a voltage of from about −

0.7 volts to about −

1.5 volts to said substrate.

23. The imaging device according to claim 20, wherein said substrate voltage pump provides a voltage of about −

1.1 volts to said substrate.

24. The imaging device according to claim 16, wherein said substrate voltage pump provides a positive voltage to said substrate.

25. The imaging device according to claim 24, wherein said substrate voltage pump provides a voltage of from about 0.25 volts to about 2.5 volts to said substrate.

26. The imaging device according to claim 24, wherein said substrate voltage pump provides a voltage of from about 0.70 volts to about 1.50 volts to said substrate.

27. The imaging device according to claim 24, wherein said substrate voltage pump provides a voltage of about 1.1 volts to said substrate.

28. An imaging system for generating an output signal based on an applied image, the imaging system comprising:

a plurality of pixels arranged into an array of rows and columns, each pixel including a photosensor, a floating diffusion node for storing charges from said photosensor, and at least one transistor formed on said substrate having a first voltage threshold that is used in operating said pixel;

a plurality of readout circuits, each readout circuit being connected to the respective pixels in a column, each readout circuit comprising at least one transistor for receiving signals from the pixels of a column and having a second voltage threshold which is lower than said first voltage threshold, said readout circuit transistor being operable to store signals received from a pixel of a respective column and to provide a pixel output signal;

at least one substrate voltage pump coupled to a supply voltage and connected to supply said substrate with a voltage; and

a row decoder having a plurality of control lines connected to the sensor array, each control line being connected to the pixel sensors in a respective row, wherein the row decoder is operable to activate the pixels in a row by row fashion.

29. The imaging system according to claim 28, wherein said pixels each comprise a photogate.

30. The imaging system according to claim 28, wherein said pixels each comprise a photodiode.

31. The imaging system according to claim 28, wherein said substrate voltage pump provides a negative voltage to said substrate.

32. The imaging system according to claim 31, wherein said substrate voltage pump provides a voltage of from about −

0.25 volts to about −

2.5 volts to said substrate.

33. The imaging system according to claim 31, wherein said substrate voltage pump provides a voltage of from about −

0.7 volts to about −

1.50 volts to said substrate.

34. The imaging system according to claim 31, wherein said substrate voltage pump provides a voltage of about −

1.1 volts to said substrate.

35. The imaging system according to claim 28, wherein said substrate voltage pump provides a positive voltage to said substrate.

36. The imaging system according to claim 35, wherein said substrate voltage pump provides a voltage of from about 0.25 volts to about 2.5 volts to said substrate.

37. The imaging system according to claim 35, wherein said substrate voltage pump provides a voltage of from about 0.7 volts to about 1.5 volts to said substrate.

38. The imaging system according to claim 35, wherein said substrate voltage pump provides a voltage of about 1.1 volts to said substrate.

39. A system comprising:

(i) a processor; and

(ii) a CMOS imaging device coupled to said processor and including;

a substrate;

at least one pixel circuit including;

a photosensitive device within a substrate for accumulating photo-generated charge;

a floating diffusion node formed in said substrate for receiving and storing charges from said photosensitive device;

at least one transistor formed on said substrate having a first voltage threshold which is used in operating said pixel;

an output node for providing a pixel signal; and

a readout circuit comprising at least one transistor which is formed on said substrate used in operation of said readout circuit, said at least one transistor being coupled to receive a signal from said pixel output node and having a second voltage threshold which is lower than said first voltage threshold, said at least one transistor providing an output signal based on a signal received from said pixel circuit; and

a substrate voltage pump coupled to a supply voltage and connected to supply said substrate with a voltage.

40. The system according to claim 39, wherein said photosensitive device comprises a photogate.

41. The system according to claim 39, wherein said photosensitive device comprises a photodiode.

42. The imaging device according to claim 39, wherein said at least one transistor of said at least one pixel circuit controllably transfers charge from said photosensitive device to said floating diffusion node, said floating diffusion node being coupled to a gate of a source follower transistor.

43. The system according to claim 39, wherein said substrate voltage pump provides a negative voltage to said substrate.

44. The system according to claim 43, wherein said substrate voltage pump provides a voltage of from about −

0.25 volts to about −

2.5 volts to said substrate.

45. The system according to claim 43, wherein said substrate voltage pump provides a voltage of from about −

0.7 volts to about −

1.5 volts to said substrate.

46. The system according to claim 45, wherein said substrate voltage pump provides a voltage of about −

1.1 volts to said substrate.

47. The system according to claim 39, wherein said substrate voltage pump provides a positive voltage to said substrate.

48. The system according to claim 47, wherein said substrate voltage pump provides a voltage of from about 0.25 volts to about 2.5 volts to said substrate.

49. The system according to claim 47, wherein said substrate voltage pump provides a voltage of from about 0.7 volts to about 1.5 volts to said substrate.

50. The system according to claim 47, wherein said substrate voltage pump provides a voltage of about 1.1 volts to said substrate.

51. The system of claim 39, wherein said at least one transistor of said at least one pixel circuit is a reset transistor for resetting said floating diffusion node to a predetermined voltage.

52. The device of claim 39, wherein said at least one transistor of said at least one pixel circuit is a row select transistor for selectively gating an output of said output transistor.

53. The system of claim 39, wherein said at least one transistor of said at least one pixel circuit is a source follower transistor for receiving photo-generated charge from said floating diffusion node.

54. A method fabricating a CMOS imager circuit, said method comprising:

forming a pixel circuit having at least one transistor having a first voltage threshold;

forming a readout circuit coupled to receive an output signal of said pixel circuit and having at least one transistor having a second voltage threshold which is lower than said first voltage threshold; and

forming a charge pump for biasing a substrate on which said pixel circuit and readout circuit are formed.

55. A method fabricating a CMOS imager circuit, said method comprising:

forming a substrate of a first conductivity;

forming a first well of said first conductivity in said substrate, said first well including a pixel area; and

forming a second well of said first conductivity and a third well of a second conductivity, said second and third well being in a peripheral logic area; and

forming a voltage pump for biasing a substrate containing said pixel area and peripheral logic area.

56. The method of claim 55, further comprising forming a pixel in said pixel area, by:

forming a reset transistor having a first voltage threshold for resetting a floating diffusion node to a predetermined voltage;

forming a transfer transistor having said first voltage threshold for transferring charge collected by said photosensitive charge collection area to a floating diffusion node;

forming a source follower transistor having said first voltage threshold for transferring charge from floating diffusion node; and

forming a row select transistor having said first voltage threshold for selectively gating an output produced by said source follower transistor.

57. The method of claim 56, further comprising forming a readout circuit for receiving a signal from said pixel in said peripheral logic area.

58. The method of claim 57, wherein said readout circuit includes at least one transistor having a second voltage threshold which is less than said first voltage threshold.

59. The method of claim 55, wherein said deep well is doped with boron implanted at a dose of about 1.0×

10¹¹ ions/cm² to about 1.0×

10¹³ ions/cm².

60. The method of claim 55, wherein said first shallow well is doped with boron implanted at a dose of about 5.0×

10¹¹ ions/cm² to about 5.0×

10¹³ ions/cm².

61. The method of claim 55, wherein said first shallow well is formed within said second shallow well.

62. The method of claim 55, wherein said first conductivity is p-type and said second conductivity is n-type.

63. The method of claim 55, wherein said first conductivity is n-type and said second conductivity is p-type.